Integrated normal-closed PDMS micro-valve, preparation process thereof and micro-pump containing micro-valve

A preparation process and microvalve technology, applied in the field of microfluidics, can solve problems such as unfavorable preparation cost and preparation process

Inactive Publication Date: 2009-09-02
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the micropump seal of the sandwich structure is relatively simple, the microfluidic channels on the glass and the channels for controlling the gas path need to be fabricated by traditional photolithography and wet etching proce...

Method used

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  • Integrated normal-closed PDMS micro-valve, preparation process thereof and micro-pump containing micro-valve
  • Integrated normal-closed PDMS micro-valve, preparation process thereof and micro-pump containing micro-valve
  • Integrated normal-closed PDMS micro-valve, preparation process thereof and micro-pump containing micro-valve

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Experimental program
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Embodiment Construction

[0023] according to figure 2 The described procedure prepares an integrated normally closed PDMS microvalve. The whole preparation process is described as follows;

[0024] ①. Pouring the PDMS mixed at 10:1 on the glass containing the fluid channel mold. The fluid channel mold is formed by developing SU-8 glue and silanized to remove air bubbles.

[0025] ②. Cover another piece of glass containing the gas channel mold (the fluid channel mold is formed by developing SU-8 glue or chrome glass through photolithography, development, etching, and silanization treatment) on the PDMS.

[0026] ③. The distance between the gas channel mold glass and the fluid channel mold glass is 100-500 microns, and they are aligned. Pressure is then applied to squeeze out excess PDMS.

[0027] ④ Put it in an oven at 80 degrees for 1 hour to make PDMS completely solidify.

[0028] ⑤. Along the edge of a piece of glass, lift it up gently to separate the glass from PDMS.

[0029] ⑥. Separate the ...

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Abstract

The invention provides an integrated normal-closed PDMS micro-valve, comprising an upper glass sheet 1, a lower glass sheet 3 and a PDMS film 2 that is arranged between the two glass sheets; wherein the upper glass sheet 1 contains a sample cell only; the lower glass sheet 3 contains an air path control hole only; and a fluid passage and an air path control passage are formed on two surfaces of the PDMS film 2 respectively. In the normal-closed valve, the fluid passage and the air path control passage are not etched on the upper glass sheet and the lower glass sheet, but formed on two surfaces of the middle PDMS film respectively; furthermore, two glass sheets only contain the sample cell and the air path control hole respectively; wherein the PDMS film can be repeatedly prepared by the same template, and the glass sheets only need to be drilled simply, thus reducing the template preparation steps of complex and high cost during the preparation process of the chip, thereby being more suitable for preparing the micro-fluidic chip of the integrated PDMS micro-valve/micro-pump.

Description

technical field [0001] The invention relates to a microfluidic chip preparation technology in the field of microfluidics, and in particular provides an integrated normally closed PDMS microvalve, a preparation process thereof, and a micropump composed of the microvalve. Background technique [0002] The microfluidic chip integrates or basically integrates the basic operation units such as sample preparation, reaction, separation, detection, cell culture, sorting, and lysis involved in the fields of chemistry and biology into a piece of several square centimeters (or even smaller). On the chip, a network of microchannels is formed to run through the entire system with controllable fluids, which is a technical platform that replaces various functions of conventional chemical or biological laboratories. Microfluidic chips are one of the most important cutting-edge technologies in the 21st century. [0003] In the past ten years, the microfluidic analysis system has developed f...

Claims

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Application Information

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IPC IPC(8): F04B43/02F04B45/04B81B3/00B81C5/00
Inventor 姜雷秦建华李博伟林炳承
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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