Integrated outer rotor type direct drive polishing machine turntable

Abstract

The invention relates to the technical field of polishing units, in particular to an integrated outer rotor type direct drive polishing machine turntable device. An inner ring of a supporting bearing is fixedly arranged on a rotor shaft disk; an outer ring of the supporting bearing is fixedly arranged in a bearing seat; a polishing disk is arranged on the rotor shaft disk; the supporting bearing supplies precise rotational support for the rotor shaft disk and the polishing disk; a direct drive motor stator is arranged inside the rotor shaft disk through a supporting disk; a circle grating is arranged at the lower end of the rotor shaft disk; and a reading head is arranged on the supporting disk and used for finishing speed and position feedback control of the turntable. The rotor disk integrates the rotor of a direct motor, realizes direct drive to the polishing disk by the direct drive motor, leads the turntable to be compact in structure and high in precision, and can be widely applied to precise polishing units.

Description

technical field [0001] The invention relates to the technical field of polishing equipment, in particular to a turntable device of an integrated outer rotor type direct drive polishing machine. Background technique [0002] Polishing equipment, especially chemical mechanical polishing equipment, is a kind of precision processing equipment. The turntable of the polishing equipment is a kind of high-precision, high-load-bearing rotating support equipment. Due to the large size of the table surface of the turntable, the high working pressure and generally partial load, the load on the turntable is relatively complicated. The removal rate of the polishing process has a certain proportional relationship with the working pressure. The rotation accuracy of the turntable table, especially the end face runout (axial runout) will affect the polishing pressure and have a great impact on the polishing quality of the workpiece. The precision requirement is higher. [0003] At present,...

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Problems solved by technology

[0006] In order to overcome the problems of low rotation precision, uncompact structure, and insufficient carrying capacity of the existing polishing machine turntable, the present invention provides an integrated outer rotor type direct drive polishing machine turntable, which is characterized in that the inner ring of the support bearing 2 is installed on the rotor On the shaft plate 3, the outer ring of the support bearing 2 is installed in the bearing seat 1; the polishing disc 6 is installed on the rotor shaft plate 3; the support plate 8 is connected with the lower end of the bearing seat 1 with bolts, and the direct drive motor stator 7 is installed with bolts in the On the support plate 8; the circular grating 9 is installed on the lower end of the rotor shaft plate 3, and the reading head 10 is installed on the support plate 8 to complete the speed and position feedback control of the turntable; the liquid collection tank 11 is installed under the outer edge of the polishing plate 6, Used to realize the collection of liquid on the upper surface of the polishing disc 6

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