Ultraprecise electrohydraulic servo-controlled dynamic-static pressure bearing and feed mechanism

Abstract

An ultraprecise electrohydraulic servo-controlled dynamic-static pressure bearing and a feed mechanism are provided with the following components: a first oil supplying system which supplies oil to a main shaft mechanism through an orifice restrictor; and a second oil supplying system which supplies oil to a front centering static pressure bearing through an electrohydraulic servo valve. A main shaft structure is composed of a centering dynamic static pressure bearing sleeve which is sleeved at the front end of the main shaft, a dynamic static pressure bearing which is sleeved at the back end of the main shaft, and a static pressure thrust bearing and a flange which are provided at the front end of the main shaft. The inner circumferential surfaces of the centering dynamic static pressure bearing sleeve and the dynamic static pressure bearing sleeve are provided with a pressure bearing groove and an oil return groove. The pressure bearing groove of the dynamic static pressure bearing sleeve is supplied with oil by the fist oil supplying system. The pressure bearing groove in the vertical direction of the centering dynamic static pressure bearing sleeve is supplied with oil by the first oil supplying system through the restrictor. The pressure bearing groove in the horizontal direction is supplied with oil by the second oil supplying system through the electrohydraulic servo valve. The oil return groove of the centering dynamic static pressure bearing sleeve and the oil return groove of the dynamic static pressure bearing sleeve are communicated with the oil tank. The static pressure thrust bearing sleeve is supplied with oil by the first oil supplying system through the orifice restrictor. The ultraprecise electrohydraulic servo-controlled dynamic-static pressure bearing and the feed mechanism of the invention have the advantages of high rotation accuracy, higher rigidity and better vibration resistance.

Description

technical field [0001] The invention belongs to a dynamic and static pressure bearing, in particular to an ultra-precision electro-hydraulic servo-controlled dynamic and static pressure bearing and a feed mechanism that can improve the rotation accuracy of the main shaft. Background technique [0002] Due to the characteristics of low friction, long service life, good anti-vibration performance and high precision, dynamic and static pressure bearings are widely used in machine tool spindles. However, with the development of industrial technology, especially the development of national defense industry and aviation industry, The requirements for the rotation accuracy of the main shaft are getting higher and higher, and the conventional dynamic and static pressure bearings can no longer meet the needs. Therefore, it is necessary to develop a dynamic and static pressure bearing with higher rotation accuracy (the radial runout of the main shaft is 0.0001 ~ 0.000001mm). At the sa...

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Problems solved by technology

[0002] Due to the characteristics of low friction, long service life, good anti-vibration performance and high precision, dynamic and static pressure bearings are widely used in machine tool spindles. However, with the development of industrial technology, especially the development of national defense industry and aviation industry, The requirements for the rotation accuracy of the main shaft are getting higher and highe

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