Large-diameter-height-ratio ultra-precision hydrostatic pressure rotary table

Abstract

The invention discloses a large-diameter-height-ratio ultra-precision hydrostatic pressure rotary table, belongs to the technical field of ultra-precision manufacturing equipment, and meets the requirements of a large-size ultra-precision lathe used for machining high-precision large-aperture non-spherical optical parts. An upper floating throttler and a lower floating throttler are respectively installed on an upper floating thrust plate and a lower floating thrust plate, the upper floating thrust plate is fixedly connected with a base seat of the rotary table, the lower floating thrust plate is fixedly connected with the base seat of the rotary table through an inner isolation ring and is arranged in an annular groove of the upper floating thrust plate, a radial bearing bush is fixedly connected with the base seat of the rotary table through the lower floating thrust plate and the inner isolation ring, a main shaft is fixedly connected with an upper floating plate, and hydraulic oil is throttled through the throttlers and forms an upper floating liquid hydrostatic pressure thrust oil film between the upper floating plate and the upper floating thrust plate, a lower floating liquid hydrostatic pressure thrust oil film between a lower floating plate and the lower floating thrust plate, and a radial hydrostatic pressure support oil film between the radial bearing bush and the main shaft, so that an axial sealed-type liquid hydrostatic pressure plane round ring thrust bearing and a radial liquid hydrostatic pressure cylindrical bearing are formed. The large-diameter-height-ratio ultra-precision hydrostatic pressure rotary table is applied to the large-size ultra-precision lathe used for machining the high-precision large-aperture non-spherical optical parts.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision manufacturing equipment, and relates to an ultra-precision hydrostatic turntable, in particular to an ultra-precision hydrostatic turntable with a large diameter-to-height ratio. Background technique [0002] With the development of a number of major scientific and engineering researches in the country, the demand for high-precision large-aperture aspheric optical components is increasing. The materials of these components are mostly hard and brittle difficult-to-machine materials. Conventional processing and testing methods can no longer meet their high-precision and high-efficiency processing requirements. Large-scale ultra-precision machine tools are an important guarantee for their deterministic batch processing. However, since the ultra-precision machine tools for processing large-diameter optical parts and their key components are products that are embargoed by foreign countries to m...

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Problems solved by technology

[0004] However, the above-mentioned prior art has the following deficiencies in varying degrees: as the processing of key parts is not easy to obtain high precision, the moment of inertia of the rotary shaft system is relatively large, the thrust plate has a large deformation under the action of hydrostatic oil pressure, and the height of the turntable It is difficult to reduce, so that the existing technology cannot fully meet the requirements of large ultra-precision machine tools for processing high-precision large-diameter aspheric optical parts

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