Method and apparatus for manufacturing quartz glass crucible
A quartz glass crucible and manufacturing method technology, applied in glass manufacturing equipment, glass molding, manufacturing tools and other directions, can solve problems such as collapse, and achieve the effects of reducing internal circulation flow, suppressing excessive overheating, and uniform heating
Active Publication Date: 2009-12-16
SUMCO CORP
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[0006] Figure 8 The air flow of the inner circulation generated in the central arc shown is reheated when the high-temperature gas flows along the electrode so that the thermal efficiency is very good, but there is a relatively small gap between the inner circulation flow part and the outer circulation flow part in the in-mold space. There is a large temperature difference, and there are cases where the part heated excessively by the internal circulation flow collapses due to a decrease in viscosity
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[0082] Using the number of electrodes shown in Table 1, they were arranged asymmetrically with respect to the shaft rotation center line, and the quartz powder deposited on the inner surface of the mold was arc-melted and vitrified. Table 1 shows the melting temperatures and temperature differences of the crucible straight body, curved portion, and bottom during arc melting. In addition, regarding the quartz glass crucible manufactured, the layer thickness ratio of the straight body part and the transparent layer at the bottom relative to the transparent layer of the curved part is shown in Table 1 (the layer thickness ratio when the layer thickness of the transparent layer of the curved part is 100 ).
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Provided is a method for manufacturing a quartz glass crucible by employing a rotating molding method. The method is characterized in performing arc-melting by arranging an electrode at a position deviated from a molding center line. The eccentric arc controls glass temperature differences among the temperatures of glass being melted at a straight trunk portion, a curved portion and a bottom portion to be 300 DEG C or below. The eccentric arc also controls the thicknesses of a transparent layer at the straight trunk portion and at the bottom portion to be within 70-120% of the thickness of the transparent layer at the curved portion.
Description
technical field [0001] The invention relates to a method for manufacturing a quartz glass crucible. In the method for manufacturing a quartz glass crucible based on rotational molding, the inner surface of the crucible can be uniformly heated. More specifically, it relates to a method for manufacturing a quartz glass crucible. The inner surface of the crucible is uniformly heated to uniformly form the layer thickness of the transparent layer from the straight part of the crucible to the curved part and the bottom. [0002] This application claims priority based on Japanese Patent Application No. 2007-310193 for which it applied on November 30, 2007, and uses the content here. Background technique [0003] A rotational molding method is known as a method of manufacturing a quartz glass crucible used for pulling silicon single crystals. This method is a manufacturing method in which quartz powder is deposited with a predetermined layer thickness on the inner surface of a rota...
Claims
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IPC IPC(8): C03B20/00C30B15/10
CPCC30B15/10C03B19/095Y02P40/57C03B20/00
Inventor 岸弘史神田稔森川正树
Owner SUMCO CORP