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Air knife device

An air knife, air technology, applied in the direction of spraying device, drying gas arrangement, cleaning method using gas flow, etc.

Active Publication Date: 2011-04-13
WEIHAI DMS OPTICAL ELECTROMECHANICAL CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] The above problems are due to the absence of a controllable device, which cannot properly adjust the injection environment of the front injection port and the rear injection port according to the size of the substrate or working conditions and caused by setting

Method used

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Embodiment Construction

[0028] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0029] Embodiments of the present invention will be described within the scope that those skilled in the art can carry out the present invention.

[0030] Therefore, the embodiments of the present invention can be implemented in various forms, and the protection scope of the present invention is not limited to the embodiments described below.

[0031] figure 1 It is a schematic diagram of a preferred setting state of an embodiment of the air knife device of the present invention, and the reference numeral 2 is a main body, and the main body 2 can be set on a conventional substrate equipped with a drying chamber D1 and a conveying device D2 as shown in the accompanying drawings The interior of drying unit D.

[0032] The conveying device D2 can convey the substrate G from one side of the drying chamber D1 to the other side, for example...

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PUM

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Abstract

The invention provides an air knife device capable of easily drying the substrate by means of ejecting air for drying to the planar display element through the substrate. The air knife includes a main body having air inlet provided therein; a first cavity disposed inside the main body for receiving air for drying supplied from the air inlet; a second cavity with the air inlet disposed between thesame and the first cavity in order to be arrange spacedly from the first cavity; a discharging unit including a first outlet and a second outlet for ejecting the air for drying in the first cavity and the second cavity to the outside; and a flow control mechanism, which is used for controlling the supply amount of air for drying from the air inlet to the first and the second cavities.

Description

technical field [0001] The present invention relates to an air knife device, in particular to an air knife device which can be applied in the drying process of a substrate for flat panel display elements, especially an air knife which sprays drying air in a double-jet manner and can easily dry the substrate. Knife device. Background technique [0002] The process of cleaning the substrate for a flat panel display element is mainly carried out by spraying (supplying) a cleaning liquid (for example, deionized water) onto the surface of the substrate, and the process is carried out in a cleaning device provided with a cleaning unit such as a nozzle for fluid spraying, And the cleaning device is in the shape of a chamber. [0003] Thus, when the substrate is cleaned by the cleaning device, it is important to dry the substrate while removing the residual cleaning liquid on the substrate. For example, after the cleaning process, if there is residual cleaning solution on the subs...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F26B21/12
CPCB05B11/0094B08B5/02B08B11/00F26B21/004G02F1/13
Inventor 朴镐胤李承俊
Owner WEIHAI DMS OPTICAL ELECTROMECHANICAL CO LTD
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