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Piezoelectric actuator and method for producing a piezoelectric actuator

A piezoelectric actuator, piezoelectric stack technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve damage to piezoelectric stack machinery Stress and other problems, to achieve the effect of small mechanical stress, reliable manufacturing, and low cost

Active Publication Date: 2010-02-10
VTESCO TECH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This causes mechanical stresses within the piezoelectric stack that damage the piezoelectric stack

Method used

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  • Piezoelectric actuator and method for producing a piezoelectric actuator
  • Piezoelectric actuator and method for producing a piezoelectric actuator
  • Piezoelectric actuator and method for producing a piezoelectric actuator

Examples

Experimental program
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Effect test

Embodiment Construction

[0041] figure 1 shows a fully active piezoelectric stack 1 embodied in the form of a cube in the illustrated embodiment, which should be further processed into Figure 9 Piezoelectric actuator 90 shown; figure 2 A flow chart of the production of the piezoelectric stack 1 and its further processing is shown.

[0042] The piezoelectric stack 1 has a plurality of piezoelectric layers 2 , between which internal electrodes 3 , 4 are each arranged. The internal electrodes 3 , 4 are formed in the form of a through-hole and extend as far as the outside of the piezoelectric stack 1 . image 3 Shown is a top view of the internal electrode 3, Figure 4 A side section of piezoelectric stack 1 is shown. The internal electrode 4 has essentially the same design as the internal electrode 3 , but is rotated by 180° relative to the internal electrode 3 in the present exemplary embodiment.

[0043] In the present exemplary embodiment, each internal electrode 3, 4 has a first and a second r...

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PUM

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Abstract

The invention relates to a fully active piezoelectric actuator (90) and to a method for producing a fully active piezoelectric actuator (90). A fully active piezoelectric stack (1) is first of all provided, which stack has alternately successive piezoelectric layers (2) and inner electrodes which pass through to the outer side (5, 6) of the piezoelectric stack (1) and each have a first region (31), which does not adhere or adheres poorly to a coating, and a second region (32) which adheres well to the coating. The inner electrodes are provided for the purpose of using their first regions (31)to alternately contact-connect a first outer electrode (10) and a second outer electrode (11) of the piezoelectric actuator (90). The outer side (5, 6) of the fully active piezoelectric stack (1) is coated with the coating at least in regions which are assigned the outer electrodes (10, 11) of the piezoelectric actuator (90). The coating (70) is then removed in regions which border the first regions (31) of the inner electrodes and the two outer electrodes (10, 11) are applied to the remaining coating (80), with the result that the outer electrodes (10, 11) contact-connect the first regions (31) of the inner electrodes and the coating (80) is otherwise arranged between the inner electrodes and the outer electrodes (10, 11).

Description

technical field [0001] The present invention relates to a vollaktive piezoelectric actuator and a method of manufacturing a vollaktive piezoelectric actuator. Background technique [0002] Piezoelectric elements are mainly used in positioning elements, ultrasonic transducers, sensors and in inkjet printers. The function of piezoelectric elements is based on the deformation of piezoelectric ceramic materials - such as lead-zirconate-titanate - by an electric field. If a voltage is applied to the piezoelectric element, the piezoelectric element stretches in a direction perpendicular to the generated electric field (converse piezoelectric effect). [0003] DE 198 02 302 A1 discloses a multilayer actuator structure. This multilayer actuator consists of several piezoceramic layers as well as internal electrodes for generating the electric field. Since many piezoceramic layers and internal electrodes are stacked on top of each other, this actuator is also referred to as a "stac...

Claims

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Application Information

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IPC IPC(8): H01L41/083H01L41/047H01L41/22H01L41/293H01L41/43
CPCH01L41/43H01L41/047H01L41/39H01L41/293H01L41/083H01L41/0472H01L41/0471H01L41/0838H01L41/29H01L41/273H10N30/872H10N30/063H10N30/053
Inventor A·多纳-赖塞尔
Owner VTESCO TECH GMBH