Three dimensional shape measuring apparatus

Abstract

Provided is a measuring probe for a three dimensional shape measuring apparatus, which has a laser light source (31); a lens (14), which focuses the laser generated from the laser light source onto areflector (9) integrally linked with a contact pin (5); a concentric circle shaped diffraction grating (8), which is configured in the laser light path of the laser reflected by the reflecting plane after light is gathered through the lens on the reflector reflecting plane of the reflector, and formed in a position where the concentric circle center biases from the laser light path; a first photodetector group (34D, 34E, 34F), receiving the positive primary diffraction light generated by the diffraction grating; and a second photodetector group (34A , 34B, 34C), receiving the negative primarydiffraction light generated by the diffraction grating. The measuring probe for a three dimensional shape measuring apparatus is configured to take the output of the first photodetector group and thesecond photodetector group as the focused error signal, and is at least built-in with the lens.

Description

[0001] This application is a divisional application, and the application number of its parent case is 2007101624178; the filing date is September 29, 2007; the invention name is "three-dimensional shape measuring device". technical field [0002] The present invention mainly relates to a measurement probe for an apparatus for measuring the shape of an object to be measured such as an aspherical lens with ultra-high precision at the nanoscale. Background technique [0003] According to the design value required by the optical design, the aspheric lens must be made into a high-precision lens with an error range of less than 0.1 microns, but only in the processing of aspheric lenses, there is no processing machine that can achieve this precision. Therefore, the inventors have invented an ultra-high-precision three-dimensional measuring machine on the order of 0.01 micron in the past. This measuring machine is widely used as a necessity for developing and manufacturing aspheric ...

AI Technical Summary

Problems solved by technology

[0026] In the structures of the above-mentioned existing patent documents 1 to 4, since the front and the back cannot be measured without turning the back of the measured object over, there is a problem that in order to make the measurement coordinate system of the front and back the same, if you do not use, for example, the patent documents Inclination and eccentricity cannot be measured with jigs as described in 7.

However, in ball screw conveyance, although a large force is output, there are problems such as poor responsiveness, deterioration of straightness due to clearance of the screw or force in the lateral direction when the screw rotates, etc.

[0052] In addition, in the structure of the constant-load spring support in Patent Document 2, since the characteristics of the two springs formed by the wound thin plates are inconsistent, sometimes a force other than the Z direction is generated, and this force deteriorates the straightness of movement in the Z axis.

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