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Broadband high-efficiency fused quartz transmission polarization correlation raster

A fused-silica, polarization-dependent technology for high-efficiency fused-silica grating applications

Active Publication Date: 2010-11-03
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But as far as we know, so far, no one has given the design parameters of broadband, high-efficiency, high-density, deep-etched fused silica transmission gratings for the commonly used 800 nm wavelength band.

Method used

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  • Broadband high-efficiency fused quartz transmission polarization correlation raster
  • Broadband high-efficiency fused quartz transmission polarization correlation raster
  • Broadband high-efficiency fused quartz transmission polarization correlation raster

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Embodiment Construction

[0016] Using micro-optical technology to manufacture broadband high-efficiency high-density deep-etched rectangular gratings, first deposit a layer of metal chromium film on a dry and clean fused silica substrate, and evenly coat a layer of positive photoresist on the chromium film (Shipley, S1818 , USA). The grating is then recorded holographically (see Figure 4 ), using a He-Cd laser 7 (with a wavelength of 441 nm) as the recording light source. When recording the holographic grating, the shutter 8 is opened, and the narrow beam emitted from the laser is divided into two narrow beams by the beam splitter 9. After one beam passes through the mirror 10, it passes through the beam expander 14 and the lens 16 to form a wide plane wave; after the other beam passes through the mirror 11, it passes through the beam expander 15 and the lens 17 to form a wide plane wave. After the two beams of plane waves pass through the mirrors 12 and 13 respectively, they form an interference f...

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Abstract

The invention relates to a broadband high-efficiency fused quartz transmission polarization correlation raster with 800 nanometers waveband, wherein the duty ratio of the raster is 0.5, the period of the raster is 680-890 nanometers and the etching depth of the raster is 1150-1250 nanometers for a TE polarized light; and the period of the raster is 870-890 nanometers and the etching depth of the raster is 1570-1630 nanometers for a TM polarized light. The broadband high-efficiency fused quartz transmission polarization correlation raster is formed by using an optical holographic record technology or combining an electron beam vertical writing device with a micro-electronic deep etching process, has complete process, low cost and important practical prospect and can be produced massively.

Description

technical field [0001] This patent relates to a high-efficiency fused silica grating, especially a broadband high-efficiency fused silica transmission polarization-dependent grating in the 800 nanometer band. Background technique [0002] Gratings are widely used in various optical systems, and one of the important uses is as a dispersion element in lasers, femtosecond pulse compression systems and wavelength division multiplexing systems. Traditional broadband high-efficiency gratings used in femtosecond pulse compression systems are divided into two categories: one is sinusoidal gold gratings, which have a low anti-damage threshold of only 0.2J / cm 2 ; The other type is based on the all-dielectric grating of the multilayer dielectric film reflector on the back, and its bandwidth is relatively narrow (about 40nm), and there are also disadvantages such as high cost and difficult manufacture. Some literatures have reported high-efficiency fused silica gratings, but mainly for...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18
Inventor 周常河吕鹏冯吉军贾伟
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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