Broadband high-efficiency fused quartz transmission polarization correlation raster
A fused-silica, polarization-dependent technology for high-efficiency fused-silica grating applications
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[0016] Using micro-optical technology to manufacture broadband high-efficiency high-density deep-etched rectangular gratings, first deposit a layer of metal chromium film on a dry and clean fused silica substrate, and evenly coat a layer of positive photoresist on the chromium film (Shipley, S1818 , USA). The grating is then recorded holographically (see Figure 4 ), using a He-Cd laser 7 (with a wavelength of 441 nm) as the recording light source. When recording the holographic grating, the shutter 8 is opened, and the narrow beam emitted from the laser is divided into two narrow beams by the beam splitter 9. After one beam passes through the mirror 10, it passes through the beam expander 14 and the lens 16 to form a wide plane wave; after the other beam passes through the mirror 11, it passes through the beam expander 15 and the lens 17 to form a wide plane wave. After the two beams of plane waves pass through the mirrors 12 and 13 respectively, they form an interference f...
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