Actuator using piezoelectric element and method of driving the same
A piezoelectric element and actuator technology, applied in electrical elements, piezoelectric effect/electrostrictive or magnetostrictive motors, recording/reproducing by optical methods, etc., can solve the problem of small application range and low accuracy And other issues
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[0035] Reference will now be made in detail to embodiments of the invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like parts throughout. The embodiments are described below in order to explain the present invention by referring to the figures.
[0036] An actuator according to an embodiment of the present general inventive concept performs micromirror driving using a piezoelectric element, and detects displacement of a piezoelectric cell.
[0037] figure 1 An actuator using a piezoelectric element according to an embodiment of the present general inventive concept is schematically shown. refer to figure 1 , the actuator according to the current embodiment includes: a micromirror device 1 including a piezoelectric element 10 having at least one piezoelectric unit and at least one piezoelectric sensor; an error detector 5 detecting an error using capacitance of the piezoelectric sensor. figure 1 The actuator ...
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