Method for preparing high-resolution emitter tungsten tip and device thereof

A high-resolution, emitter technology, applied in the direction of measuring devices, cold cathode manufacturing, electrode system manufacturing, etc., can solve the problems of increasing the emission threshold voltage, the difficulty of emitter needle tip, and the inapplicability of liquid metal ion source needle tip, etc., to achieve the preparation The method is simple, the surface morphology is excellent, and the production cost is low.

Inactive Publication Date: 2010-05-05
CHINA UNIV OF MINING & TECH (BEIJING)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is difficult to prepare an emitter tip with ultra-high resolution and stable emission of liquid metal by conventional methods. If the aspect ratio of the tip is too large, the flow rate of liquid metal will be insufficient and in practical applications, there will be a gap between the emitter tip and the extraction

Method used

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  • Method for preparing high-resolution emitter tungsten tip and device thereof
  • Method for preparing high-resolution emitter tungsten tip and device thereof
  • Method for preparing high-resolution emitter tungsten tip and device thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0029] Accurately prepare a certain concentration of corrosion solution, according to the mass percentage, the composition of the corrosion solution is 10% of saturated NaOH and 90% of deionized water. Put the corrosive liquid in the cooler for low-temperature cooling, take it out when it reaches 5°C, fix it horizontally in the constant temperature controller, adjust the constant temperature control system, and maintain the temperature of the corrosive liquid at a constant temperature.

[0030] Take a piece of W wire with a length of 18 mm and a diameter of 0.18 mm, and after hydrogen flame annealing at 780 ° C, completely remove its surface oxide layer, and fix one end of the prepared W wire on the screw fine adjustment device.

[0031] Take the special Kovar metal wire as the metal ring electrode, process it to make it a standard circle, connect it with a wire and fix it on the support of the corrosion system as the auxiliary electrode, and connect it with the auxiliary elect...

Embodiment 2

[0036] Accurately prepare a certain concentration of corrosion solution, according to the mass percentage, the composition of the corrosion solution is 20% of saturated NaOH and 80% of deionized water. Put the corrosive liquid in the cooler for low-temperature cooling, take it out when it reaches 7°C, fix it horizontally in the constant temperature controller, adjust the constant temperature control system, and keep the temperature of the corrosive liquid at a constant temperature.

[0037] Take a section of W wire with a length of 30 mm and a diameter of 0.18 mm, and after hydrogen flame annealing at 780 ° C, completely remove its surface oxide layer, and fix one end of the prepared W wire on the screw fine adjustment device.

[0038] Take the special Kovar metal wire as the metal ring electrode, process it to make it a standard circle, connect it with a wire and fix it on the support of the corrosion system as the auxiliary electrode, and connect it with the auxiliary electro...

Embodiment 3

[0043] Accurately prepare the corrosion solution with a certain concentration. According to the mass percentage, the composition of the corrosion solution is 30% saturated NaOH and 70% deionized water. Put the corrosive liquid in the cooler for low-temperature cooling, take it out when it reaches 10°C, fix it horizontally in the constant temperature controller, adjust the constant temperature control system, and maintain the temperature of the corrosive liquid at a constant temperature.

[0044] Take a section of W wire with a length of 50 mm and a diameter of 0.22 mm, and after hydrogen flame annealing at 780 ° C, completely remove its surface oxide layer, and fix one end of the prepared W wire on the screw fine adjustment device.

[0045] Take the special Kovar metal wire as the metal ring electrode, process it to make it a standard circle, connect it with a wire and fix it on the support of the corrosion system as the auxiliary electrode, and connect it with the auxiliary el...

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Abstract

The invention discloses a method for preparing a high-resolution emitter tungsten tip and a device thereof, and relates to a liquid metal ion source with high-resolution secondary ion mass spectrometry (SIMS). The invention provides the method for rapidly and safely preparing the emitter tungsten tip with simpleness and high repeatability. The device is provided with an AC voltage signal generating circuit, a corrosion current monitoring circuit, a corrosion voltage monitoring circuit, an automatic corrosion control system, a spiral micro-regulator, a corrosion electrolytic cell and a constant temperature control system. Corrosion solution is placed in a cooler for low-temperature cooling before the manufacture and taken out till a certain temperature, then the cooler with the corrosion solution is horizontally fixed in the constant temperature controller, and the constant temperature control system is regulated for keeping the temperature of the corrosion solution at constant temperature. A clean tungsten wire is taken and annealed by hydrogen flame, one end of the tungsten wire is fixed on the spiral micro-device and used as a pole, and the other pole is a metal annular electrode placed in the NaOH corrosion solution; the metal annular electrode is horizontally placed at the middle and lower part at the bottom of the corrosion electrolytic cell; a central point of the metal annular electrode is taken by the tungsten wire and vertically inserted in the corrosion solution; the tungsten wire is inserted in the corrosion solution, and the insertion depth is kept; the corrosion current is monitored till the corrosion current achieves a threshold; pulse corrosion is continued, and roughening treatment is carried out on the tip, and the length to width ratio of the tip is controlled.

Description

technical field [0001] The invention relates to a liquid metal ion source for high-resolution secondary ion mass spectrometry (SIMS), in particular to a method and a device for conveniently and effectively preparing a high-resolution emitter W needle tip. Background technique [0002] The high-resolution secondary ion mass spectrometry (SIMS) liquid metal ion source has many applications in the fields of focused ion beam micromachining, microscopy, and mass spectrometry. The size, shape and liquid metal composition of the probe directly affect the resolution quality of the secondary ion mass spectrometer. The sharper the tip and the more symmetrical the shape, the higher the resolution and image quality. At present, there are mainly methods for preparing W needle tips, such as mechanical forming method and electrochemical corrosion method. The equipment is simple and easy to operate, and high-quality needle tips can be obtained. Electrochemical corrosion methods for W-tips...

Claims

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Application Information

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IPC IPC(8): C25F3/08C25F7/00H01J9/02B82B3/00G12B21/04G01N13/12
Inventor 梁汉东李文攀盛守祥许世波
Owner CHINA UNIV OF MINING & TECH (BEIJING)
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