The invention discloses a method for preparing a high-resolution emitter
tungsten tip and a device thereof, and relates to a
liquid metal ion source with high-resolution
secondary ion mass spectrometry (SIMS). The invention provides the method for rapidly and safely preparing the emitter
tungsten tip with simpleness and high
repeatability. The device is provided with an AC
voltage signal generating circuit, a
corrosion current monitoring circuit, a
corrosion voltage monitoring circuit, an automatic
corrosion control system, a spiral micro-
regulator, a corrosion
electrolytic cell and a constant
temperature control system.
Corrosion solution is placed in a cooler for low-temperature cooling before the manufacture and taken out till a certain temperature, then the cooler with the corrosion solution is horizontally fixed in the constant temperature controller, and the constant
temperature control system is regulated for keeping the temperature of the corrosion solution at constant temperature. A clean
tungsten wire is taken and annealed by
hydrogen flame, one end of the tungsten wire is fixed on the spiral micro-device and used as a pole, and the other pole is a
metal annular
electrode placed in the NaOH corrosion solution; the
metal annular
electrode is horizontally placed at the middle and lower part at the bottom of the corrosion
electrolytic cell; a central point of the
metal annular
electrode is taken by the tungsten wire and vertically inserted in the corrosion solution; the tungsten wire is inserted in the corrosion solution, and the
insertion depth is kept; the corrosion current is monitored till the corrosion current achieves a threshold; pulse corrosion is continued, and roughening treatment is carried out on the tip, and the length to
width ratio of the tip is controlled.