Method for quickly and precisely adjusting focal plane in laser trimming membrane resistance
A thin-film resistor, precise adjustment technology, applied in the field of focusing, can solve problems such as difficulty in meeting precision requirements, and achieve the effect of improving efficiency and adjusting quickly, easily and effectively
Inactive Publication Date: 2012-04-11
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
[0004] In the process of laser trimming of thin-film chip resistors, the focal plane has a very important influence on the consistency of the resistance notch. The position deviation and angle deviation of the focal plane will affect the quality of the notch. The focal plane of the thin-film resistor is particularly sensitive. Adjust the focus The positional deviation of the surface is within 5 μm ~ 10 μm, and the angle deviation is within 30″ to meet the requirements, so this traditional adjustment method is difficult to meet the accuracy requirements
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[0017] The focusing method of the present invention will be further described in detail in the following embodiments given in conjunction with the accompanying drawings.
[0018] refer to figure 2 , a method for quickly and accurately adjusting the focal plane in a laser trimming thin film resistor is to set a laser 1, a first adjustment mirror 2, a second adjustment mirror 3, and a second adjustment mirror 3 on an optical platform 9 , beam expander 4, X-direction scanning galvanometer 5, Y-direction scanning galvanometer 6 and the optical-mechanical system formed by scanning field mirror 7 carry out quantitative adjustment; Described scanning field mirror 7 is placed on a precision displacement table 11 , and supplemented by a spirit level 12 and a height gauge 13, according to the observation of the photolithographic effect, the rapid and precise adjustment of the focal plane can be realized according to the following steps:
[0019] a. carry out focus coarse adjustment, a...
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The invention relates to a focusing method used in performing laser precision processing on materials, in particular to a method for quickly and precisely adjusting a focal plane in laser trimming membrane resistance. The method carries out quantitative adjustment by adding a precision displacement platform as well as a gradienter and a height gauge and realizes quick and precise adjustment of the focal plane through observing lithography effects, and comprises the following steps: firstly, adjusting a bolt to ensure that the height of a scanning field lens on an optical platform from a work table is similar to the position of the focal plane; and then, carrying out precise adjustment twice through the precision displacement platform to realize position and angle precision of the focal plane. The method provides a quick, simple, and effective high-precision focal plane adjusting means for processing membrane resistance on a membrane resistance trimming machine, thereby remarkably improving product quality.
Description
technical field [0001] The invention relates to a focus adjustment method in laser precision machining of materials, in particular to a method for quickly and accurately adjusting the focus plane in laser trimming of thin film resistors. Background technique [0002] The traditional chip resistor has a thicker film layer, which is trimmed by infrared laser and has a larger depth of focus. The traditional method can meet the requirements of adjusting the position deviation of the focal plane within 50 μm to 100 μm and the angle deviation within 5′. Thin-film resistance adjustment The optomechanical system of the machine such as figure 1 As shown, it includes a laser 1, a first adjustment mirror 2, and a second adjustment mirror 3. A beam expander 4 is placed along the optical axis behind the second adjustment mirror 3, and a two-dimensional vibrating mirror is placed behind the beam expander 4. Including the X-direction scanning galvanometer 5 and the Y-direction scanning ga...
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IPC IPC(8): B23K26/42B23K26/04
Inventor 王忠生汤建华吴玉斌田兴志王洋
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI