Gas pressure and flow control device of humidity generator

A technology of flow control device and humidity generator, applied in non-electric variable control, control/regulation system, and simultaneous control of multiple variables, etc., can solve the problems of troublesome operation and low precision, avoid pressure instability, improve High-resolution, high-stability effects

Inactive Publication Date: 2010-08-04
SHANGHAI INST OF MEASUREMENT & TESTING TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is to provide a method and device for controlling the gas pressure and flow of the humidity generator, which solves the defect that the operation is troublesome but the precision is not high

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  • Gas pressure and flow control device of humidity generator
  • Gas pressure and flow control device of humidity generator
  • Gas pressure and flow control device of humidity generator

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Embodiment Construction

[0033] Below in conjunction with specific embodiment, further illustrate the present invention.

[0034] Because the working pressure range of the saturator is very wide (5kPa~1000kPa), in order to directly control the accuracy and stability of the pressure sensor of the saturator, the accuracy and stability of the pressure sensor with a single range cannot meet the requirements, so the pressure adjustment of the saturator is divided into segment.

[0035] Take the pressure adjustment range of the saturator as an example from 95kPa to 1050kPa (absolute pressure), see figure 2 Gas circuit diagram, in order to improve the resolution of the pressure measurement signal, the entire pressure range is divided into four sections, namely:

[0036] 1) 250kPa>Ps≥95kPa (pressure sensor 4, range 0~0.25MPa);

[0037] 2) 350kPa>Ps≥250kPa (pressure sensor 3, range 0.25~0.4MPa);

[0038] 3) 600kPa>Ps≥350kPa (pressure sensor 2, range 0.4~0.6MPa);

[0039] 4) 1050kPa≥Ps≥600kPa (pressure sen...

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Abstract

The invention relates to a humidity generator, belonging to the field of two-pressure humidity generators. A gas pressure and flow control method of the humidity generator is characterized by comprising the following steps: arranging a pressure sensor on a saturator of the humidity generator to monitor and transfer the pressure in the saturator in real time; setting voltage according to the gas pressure required to be reached; comparing the value of the set voltage with the value of the feedback voltage transferred by the pressure sensor in real time, and controlling gas of gas sources to enter the saturator according to the comparison result; and when the pressure in the saturator reaches the set value, controlling the flow of the gas passing through a testing room of the humidity generator to reach the set value. The invention also relates to a device for controlling pressure and flow of gas by using the method. The invention enables the pressure to always stabilize at the set valueautomatically, avoids the current phenomenon of unstable pressure, and realizes the high stability of pressure control.

Description

technical field [0001] The invention relates to a humidity generator, in particular to a gas pressure and flow control device for the humidity generator. Background technique [0002] The working principle of the double-pressure method standard humidity generator is that the gas is saturated with water vapor in a pressurized state and then decompressed and expanded, and different relative humidity is generated by changing the pressure of the saturator. The stability of the saturator pressure control therefore directly affects the uncertainty of the humidity generated by the generator. While controlling the pressure of the saturator, the flow rate of the sample gas flowing through the saturator should be freely adjustable within a certain range. The dual-pressure humidity generator usually consists of the following six parts: gas source system; carrier gas drying system; saturator system; test chamber; constant temperature system; temperature and pressure measurement and con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D27/00
Inventor 张文东
Owner SHANGHAI INST OF MEASUREMENT & TESTING TECH
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