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Precision strip heating element

A technology of heating elements and heating components, which is applied in the manufacture of furnace heating elements, electrical components, semiconductor/solid-state devices, etc., and can solve the problems of high labor of wire-type elements, operating temperature limit of wire-type elements, heating, etc.

Active Publication Date: 2010-08-11
KANTHAL THERMAL PROCESS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, filament-type elements are generally limited in operating temperature because they are embedded or semi-embedded in the surrounding medium such as insulating material
Furthermore, filamentary elements are often not precisely formed, are highly labor intensive and have intermediate surface to mass ratios, resulting in rapid heating and cooling

Method used

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  • Precision strip heating element
  • Precision strip heating element
  • Precision strip heating element

Examples

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Embodiment Construction

[0024] The exemplary embodiment of the heating element 10 includes a continuous planar strip 12 and a plurality of mounting members 14. The path of the continuous strip 12 from the first end 16 to the second end 18 is circuitous and includes a plurality of repeated loops 20. Each repeating cycle 20 includes a plurality of non-parallel first straight sections 22, a plurality of second straight sections 24, and a plurality of curved sections 26. The angle sum of a single loop of the circuitous path is greater than 360 degrees.

[0025] The heating element 10 has a radiating surface 30 that extends substantially in a first plane and is substantially contained in the first plane. In this first plane, for example within ±15 degrees perpendicular to the axis 32, a plurality of first straight segments 22 are oriented substantially transversely with respect to the axis 32, which extends from the first end of the heating element 10 34 is oriented to the second end 36 of the heating elem...

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Abstract

A heating element includes a continuous planar strip and a plurality of mounting members. A path of the continuous strip from a first end to a second end is circuitous and includes a plurality of repeating cycles, each of which includes a plurality of first straight segments, a plurality of second straight segments and a plurality of radiused segments. A length of the first straight segment is greater than a length of the second straight segment and an angular sum of a single cycle of the circuitous path is greater than 360 degrees. The heating element can be incorporated into a heating assembly for, as an example, semiconductor processing equipment.

Description

Technical field [0001] The present disclosure relates to heating elements. More specifically, the present disclosure relates to strip heating elements for furnaces, such as semiconductor processing furnaces, having a circuitous path that includes straight and rounded segments that are advantageously suitable for thermal expansion and contraction. Background technique [0002] In the background discussion that follows, reference is made to specific structures and / or methods. However, the following references should not be construed as an admission that these structures and / or methods constitute prior art. The applicant expressly reserves the right to argue that this structure and / or method is not limited to the prior art. [0003] Traditional heating elements are usually formed of metal wires or metal sheets with various designs and geometric shapes. However, because they are embedded or semi-embedded in a surrounding medium such as an insulating material, the wire-type element i...

Claims

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Application Information

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IPC IPC(8): H05B3/64
CPCH05B3/62Y10T29/49083H01L21/67103H01L21/67109
Inventor 凯文·B·佩克
Owner KANTHAL THERMAL PROCESS INC
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