Quaternary upright lighting diode with double roughened surfaces and preparation method thereof
A technology of light-emitting diodes and quaternary systems, applied in electrical components, circuits, semiconductor devices, etc., can solve problems such as affecting product reliability, increasing the temperature of light-emitting diodes, and poor light output.
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[0024] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0025] Such as figure 1 As shown, the preparation method of the quaternary system vertical light-emitting diode with double-layer roughening of the surface, the production process steps are as follows:
[0026] A distributed Bragg reflection layer 2 , a first-type epitaxial layer 3 , a light-emitting layer 4 and a second-type epitaxial layer 5 are formed by sequential epitaxial growth on the GaAs substrate 1 .
[0027] A first GaP window layer 6 is formed on the second-type epitaxial layer 5, and the thickness of the first GaP window layer 6 is 2um.
[0028] Wet etching is adopted, and the etching solution is composed of HF, NH 4 F, CH 3 COOH, H 2 SO 4 、H 2 o 2 The first GaP window layer 6 is etched to form a network structure composed of small round holes; the diameter of the small round holes is 4um, and the distance between the small round hol...
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