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Coating raw material containing device

A technology for containing devices and raw materials, applied in sputtering coating, ion implantation coating, vacuum evaporation coating and other directions, can solve the problems of long time consumption, discontinuous coating process, cumbersome steps, etc., and achieve easy access and coating. effect of time reduction

Inactive Publication Date: 2010-10-27
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The steps of this process are cumbersome and time-consuming, which makes the coating efficiency low, and the coating quality is affected due to the discontinuous coating process

Method used

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  • Coating raw material containing device
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  • Coating raw material containing device

Examples

Experimental program
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Effect test

Embodiment Construction

[0010] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0011] see figure 1 , is a coating raw material storage device 10 provided in an embodiment of the present invention, which is used in a coating device 100 . The coating device 100 includes the coating material storage device 10 and a coating umbrella 20 . The coating raw material storage device 10 is used for accommodating the coating raw material 30, which is fixed on a fixed platform (not shown). The coating raw material 30 in the coating raw material storage device 10 can cover the component to be coated (not shown) of the coating umbrella 20 to form a film after being evaporated.

[0012] Please combine Figure 2 to Figure 4 , the coating raw material storage device 10 includes a bearing seat 11 , a plurality of crucibles 12 and a lifting mechanism 13 . The crucible 12 is fixed on the lifting mechanism 13 and accommodated in the bearing base 11 , and...

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PUM

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Abstract

The invention relates to a coating raw material containing device which comprises a bearing seat, a plurality of crucibles and a lifting mechanism, wherein the plurality of crucibles are superposed, are mutually fixed and are used for containing coating raw materials, the bearing seat is provided with a containing cavity; the crucibles are fixed on the lifting mechanism and are contained in the containing cavity; the bearing seat is provided with an opening, and the opening is aligned with the crucibles; the lifting mechanism comprises a support shaft, and one end of the support shaft is fixedly connected with the crucibles; and the lifting mechanism can drive the crucibles to move up and down relative to the bearing seat. The coating raw material containing device can move an empty crucible in the bearing seat to the opening through the lifting mechanism to enable the crucible to be conveniently taken, thereby saving the step of resetting the crucible, reducing the coating time, and coherently carrying out the coating process.

Description

technical field [0001] The invention relates to a coating device, in particular to a coating raw material storage device. Background technique [0002] In the traditional electron gun evaporation coating process, the coating material is usually placed in a crucible, and the crucible is accommodated in a holding tank on a fixed platform. When coating, the coating material in the crucible is hit by an electron gun to form a film on the equipment to be coated. However, when using the above method to coat multilayer films or when the coating raw materials in the crucible are used up each time, it is necessary to first take out the crucible from the storage tank, then replace the coating raw materials, and then put the replaced coating raw materials and the crucible into the storage tank for further evaporation. The steps of this process are cumbersome and time-consuming, which makes the coating efficiency low, and because the coating process is discontinuous, the coating quali...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/56
Inventor 裴绍凯
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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