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Preparation method of transmission electron microscope micro-grid

一种透射电镜、微栅的技术，应用在放电管/灯的制造、电极系统制造、化学仪器和方法等方向，能够解决微栅易发生飘移、影响透射电镜分辨率测量的准确性等问题，达到消除容易飘移、提高分辨率及准确性的效果

Active Publication Date: 2013-03-13
BEIJING FUNATE INNOVATION TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the relatively light weight of carbon nanotubes, they are prone to drift when applied to microgrids, which affects the resolution and measurement accuracy of the transmission electron microscope.

Method used

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  • Preparation method of transmission electron microscope micro-grid
  • Preparation method of transmission electron microscope micro-grid
  • Preparation method of transmission electron microscope micro-grid

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preparation example Construction

[0092] see Figure 9 to Figure 11 , this embodiment specifically provides a method for preparing the above-mentioned TEM microgrid 50 . The preparation method includes the following steps: (S10) providing the carrier 510 and the fixed body 530, the carrier 510 has a plurality of first through holes 516, and the fixed body 530 has a plurality of second through holes 536; ( S20) Provide a carbon nanotube structure 520, and cover the first through hole 516 of the carrier 510 with the carbon nanotube structure 522; (S30) stack the fixed body 530 and the carrier 510 so that the carbon The nanotube structure 522 is fixed between the carrier 510 and the fixing body 530 .

[0093] In the step (S10), the carrier 510 and the fixing body 530 are integrally formed, and the connection between the carrier 510 and the fixing body 530 has a folding portion 550, and the carrier 510 and the fixing body 530 can be completely closed through the folding portion 550 Or open any angle. In this em...

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Abstract

A method for making a TEM micro-grid is provided. The method includes the following steps. A carrier, a carbon nanotube structure, and a protector are provided. The carrier defines a first through opening. The protector defines a second through opening. The protector, the carbon nanotube structure and the carrier are stacked such that the carbon nanotube structure is located between the carrier and the protector. The second through opening at least partly overlaps with the first through opening.

Description

technical field [0001] The invention relates to a preparation method of a transmission electron microscope microgrid, in particular to a preparation method of a transmission electron microscope microgrid based on a carbon nanotube structure. Background technique [0002] In transmission electron microscopy, the microgrid is an important tool for carrying powder samples for high-resolution transmission electron microscopy (HRTEM) observation. In the prior art, the microgrid of the transmission electron microscope is usually made by covering a layer of porous organic film on a metal grid such as copper mesh or nickel mesh, and then vapor-depositing a layer of amorphous carbon film. However, in practical applications, when using the above-mentioned micro-grid to analyze the composition of the high-resolution transmission electron microscope image of the tested sample, especially when observing the high-resolution transmission electron microscope image of particles with a relati...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J9/00H01J37/20
CPCB32B5/26B82Y15/00B32B9/04B32B5/12H01J2237/2007B32B9/005B32B9/007B32B9/041B32B15/20B32B3/266B32B2307/514B32B2307/54B32B2307/558B32B2307/732B32B2551/00Y10T156/1049Y10T29/49885
Inventor 刘亮范立冯辰潜力王昱权
Owner BEIJING FUNATE INNOVATION TECH