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Online plasma cleaner

A plasma cleaning machine and cleaning machine technology, applied in the field of ion cleaning machines, can solve the problems of low automation and secondary pollution, and achieve the effect of improving yield and overcoming secondary pollution

Active Publication Date: 2012-01-11
CHINA ELECTRONIC TECH GRP CORP NO 2 RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The invention provides an online plasma cleaning machine which solves the problem that the existing equipment has a low degree of automation and easily causes secondary pollution

Method used

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Embodiment Construction

[0013] The present invention is described below in conjunction with accompanying drawing:

[0014] The online plasma cleaning machine includes the clamping and fixing device 16 of the lead frame carrier arranged in the cleaning machine frame 22, the visual positioning system 17, the industrial control machine 18, the transmission system 20, and the vacuum lifting system 21. The vacuum lifting system 21 is provided with a door-shaped vertical plate support 1, on which the vertical plate support 1 is provided with a vertical guide rail 5, and a connecting plate is movably arranged on the guide rail 5, and the connecting plate is fixedly arranged on the door-shaped The piston rods of the lifting cylinder 4 on the back side of the vertical plate support 1 are connected together, a pair of L-shaped cantilevers 8 are fixedly arranged on the front panel of the connecting plate, and a reaction chamber loam cake 3 is suspended at the end of the L-shaped cantilever 8 , the upper cover 3...

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Abstract

The invention provides an online plasma cleaner, which solves the problems of low automation and easy secondary pollution generation of the conventional equipment. The online plasma cleaner comprises a lead frame carrier clamping and fixing device (16) arranged in the machine frame (22) of the cleaner, a visual orientation system (17), an industrial control machine (18), a transmission system (20) and a vacuum lifting system (21), wherein a door-shaped vertical bracket (1) and guide rails (5) are arranged in the vacuum lifting system (21); a connecting plate is movably arranged on the guide rails (5) to connect the guide rails (5) with the piston of a lifting air cylinder (4); the front panel of the connecting plate is fixedly provided a pair of L-shaped cantilevers (8); the end parts of the L-shaped cantilevers (8) are provided with a reaction cabin upper cover f(3); an air inlet valve (15) for a plasma cleaning gas is arranged on the side wall of the reaction cabin; and a plasma radio frequency source is arranged in the reaction cabin. Secondary pollution is avoided in a cleaning process. The rate of finished product is improved.

Description

technical field [0001] The invention relates to an on-line plasma cleaning machine, in particular to an on-line plasma cleaning machine which uses dry cleaning technology to clean LED lead frames. Background technique [0002] Pollutants such as microparticles, organic matter and surface oxides on the surface of LED (light-emitting diode) lead frame cannot be removed by traditional cleaning methods. Radio frequency plasma cleaning technology is now used. When the plasma cleaning machine cleans LED (light-emitting diode)) lead frame Generally, it is carried out in batches, and the existing equipment has the problem of low degree of automation and easy to cause secondary pollution. Contents of the invention [0003] The invention provides an online plasma cleaning machine, which solves the problem that the existing equipment has a low degree of automation and easily causes secondary pollution. [0004] The present invention solves the above problems through the following so...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B7/00
Inventor 李俊岭
Owner CHINA ELECTRONIC TECH GRP CORP NO 2 RES INST