Silicon core furnace repeatedly pulling multiple silicon cores in one heat
A technology of silicon core furnace and silicon core, which is applied in the field of carrier-silicon core device and silicon core furnace, can solve the problems of manpower, material resources and energy consumption, and low output of a single furnace, so as to reduce manpower, energy consumption, cost reduction effect
Inactive Publication Date: 2012-02-08
XAUT CRYSTAL GROWING TECH CO LTD
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[0004] The purpose of the present invention is to provide a silicon core furnace that draws multiple silicon cores multiple times in one heat, which solves the problems of the existing silicon core furnace with low output per heat and huge consumption of manpower, material resources and energy
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[0016] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0017] like figure 1 , figure 2 The silicon core furnace structure of the device of the present invention is that a lower transmission device 9 and a water cooling device 11 are arranged in the frame 10, and a lower furnace chamber 5 and a tank road block 12 are installed on the table surface and the rear of the frame 10, and the tank A high-frequency tank 13 connected to a high-frequency power supply is provided on the road block 12, and an inflator 6, a high-frequency electrode and an induction heating assembly 7, and an evacuation device 8 are arranged inside the lower furnace chamber 5, and the inflator 6 is in contact with the outside world. The argon gas supply device is connected, the high-frequency electrode and the induction heating assembly 7 are connected with the high-frequency tank 13, and the evacuation device 8 is connected w...
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The invention discloses a silicon core furnace repeatedly pulling multiple silicon cores in one heat. A lower transmission device and a water cooling device are arranged in a rack, a lower furnace chamber and a slot way pulley are arranged on the rack, the slot way pulley is provided with a high frequency slot way, the lower furnace chamber is internally provided with an air charging device, a high frequency electrode and induction heating assembly and an evacuator, and the high frequency electrode and induction heating assembly is connected with the high frequency slot way; and the lower furnace chamber is communicated with the upper furnace chamber, guide steel wires are arranged in the lower furnace chamber and the upper furnace chamber and run through the lower furnace chamber and the upper furnace chamber from top to bottom, a guide frame is arranged on the guide steel wire and is provided with a seed card head seat and a seed card head, the upper end of the upper furnace chamber is provided with a seed unloading and turnplate dividing device, an upper transmission device is arranged above the upper furnace chamber, a transition assistant chamber is arranged between the upper furnace chamber and the upper transmission device, and the upper transmission device is connected with the seed card head seat by a flexible shaft. The silicon core furnace in the invention can realize broaching of 15-18 silicon cores in one heat, improves production efficiency of silicon cores, and lowers cost for producing polysilicon.
Description
technical field [0001] The invention belongs to the technical field of photovoltaic industry, and relates to a device for growing polysilicon carrier-silicon cores in a reduction furnace in the process of producing polysilicon by adopting the improved Siemens method, in particular to a silicon core for multiple times of drawing multiple silicon cores in one furnace furnace. Background technique [0002] With the global consensus on green energy, the photovoltaic industry has developed rapidly. As an upstream product in the photovoltaic industry chain, polysilicon is in short supply. Powerful business giants at home and abroad have invested huge sums of money in the polysilicon industry. The scale of development is getting larger and larger. Silicon The core furnace is an important link in the polysilicon production chain, and the demand is also increasing. [0003] At present, silicon core furnaces used in large quantities can only draw one silicon core at a time, and only ...
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IPC IPC(8): C30B28/10C30B29/06
Inventor 董淑梅王俊辉王建春宋艳玲原洛渭王一强吴斌李春蕊贾志华刘凯薛武鹏
Owner XAUT CRYSTAL GROWING TECH CO LTD