Apparatus and method for coating paste
A coating device and coating technology, which is applied to the surface coating liquid device, spraying device, coating, etc., can solve the problem of high-precision control of paste coating amount, long acceleration and deceleration distance, and paste Coating time becomes longer, etc.
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[0019] Embodiments of the present invention will be described with reference to the drawings.
[0020] Such as figure 1 As shown, the paste coating device 1 according to the embodiment of the present invention is equipped with: figure 1 The state along the X-axis direction and the Y-axis direction perpendicular to it) places the stage 2 of the substrate K as the coating object; holds the stage 2 and makes it in the X-axis direction and the Y-axis direction The stage moving mechanism 3 that moves; the coating head 4 that applies a paste such as a sealant (for example, a paste with sealing and adhesive properties) to the substrate K on the stage 2; the coating head 4 The head moving mechanism 5 that moves in the Z-axis direction; the range finder 6 that measures the distance from the substrate K on the stage 2; the gas supply part 7 that supplies gas to the coating head 4; adjusts the supply pressure of the gas (gas Flow rate) adjustment unit 8; and control unit 9 for controll...
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