Apparatus and method for coating paste

Abstract

The invention relates to an apparatus and method for applying a paste, capable of preventing the generation of the non-uniform coating amount of the paste and shortening the time of coating the paste. A control part (9) controls an adjusting part (8) and moving mechanisms (3, 5) in the figure drawing in such an way that the relative speed of an objective table (2) and a jet nozzle (4b) in the face direction is decreased in the occasion that the relative position of the jet nozzle (4b) relative to the coating object (K) on the objective table (2) is changed from a first straight line part to a corner part to reduce the discharge pressure, moreover, the separating distance of the coating object (K) on the objective table (2) and the jet nozzle (4b) is narrowed, the relative speed of the objective table (2) and the jet nozzle (4b) in the face direction is increased in the occasion that the relative position of the jet nozzle (4b) relative to the coating object (K) on the objective table (2) is changed from the corner part to a second straight line part to improve the discharge pressure, and the separating distance of the coating object (K) on the objective table and the jet nozzle is enlarged.

Description

technical field [0001] The present invention relates to a paste coating device and a paste coating method for coating a paste on an object to be coated. Background technique [0002] Paste coating equipment is used to manufacture various devices such as liquid crystal display panels. This paste coating device is equipped with a coating head that discharges paste to the coating target object, and while the coating head and the coating target object are relatively moved, the paste is coated on the coating target object to draw a predetermined coating. Apply graphics (paste graphics). [0003] At this time, in the paste coating device, in order to obtain a uniform coating amount of paste, the surface height of the substrate as the coating object is measured, and the nozzle of the coating head is moved up and down based on the measured value, and The distance between the tip of the nozzle of the coating head and the surface of the substrate is kept constant (for example, refer...

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Problems solved by technology

[0006] However, as described above, in the case of changing the discharge pressure of the applicator head, that is, the flow rate control of the supply gas in accordance with the change of the coating speed at the corner, due to the compressibility of the gas, the electro-pneumatic pressure regulating valve The adjusted pressure is low in responsiveness until it acts on the paste as the discharge pressure, so it is difficult to control the paste application amount with high precision, resulting in uneven paste application amount

[0007] In addition, when the deceleration and acceleration of the coating speed are matched with the low responsiveness of the discharge pressure, an additional acceleration and deceleration distance is required before the entrance of the corner and after the exit. It is determined by the responsiveness of the discharge pressure or the responsiveness of the discharge pressure. Therefore, if the coating speed increases, the acceleration and deceleration distance becomes longer, and as a result, the paste coating time becomes longer.

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