Preparation method of silicon nitride ceramics ring for polysilicon reduction furnace

A technology of silicon nitride ceramics and reduction furnace, which is applied in the preparation of silicon nitride ceramic rings for polysilicon reduction furnaces, and in the field of preparation of ceramic rings, which can solve the problems of insulating ring electrode breakdown, affecting production efficiency, and insulating rings are easy to fail. , to achieve the effect of prolonging service life, long service life and good insulation

Active Publication Date: 2011-02-02
SINOMA SYNTHETIC CRYSTALS CO LTD +1
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

After long-term high-temperature and high-pressure operation, the insulating ring is prone to failure, resulting in electrical breakdown and production accidents
[0004] Therefore, it is necessary to prepare a high-temperature-resistant high-insulation ceramic material to prevent electrode breakdown caused by the failure of the insulating ring due to high temperature and high pressure.
At present, most of the insulating rings used are alumina ceramics. Due to the performance limitation of alumina ceramics, their service life is very short, which brings great inconvenience to production and directly affects production efficiency.

Method used

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  • Preparation method of silicon nitride ceramics ring for polysilicon reduction furnace
  • Preparation method of silicon nitride ceramics ring for polysilicon reduction furnace

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preparation example Construction

[0033] figure 1 It is the flowchart of the preparation method of the silicon nitride ceramic ring for the polysilicon reduction furnace described in the embodiment of the present invention, as figure 1 Shown, the preparation method of silicon nitride ceramic ring for polysilicon reduction furnace of the present invention comprises the following steps:

[0034] 1) Weigh various raw materials and stir in the medium to obtain a uniform slurry;

[0035] 2) The slurry is dried and granulated to make the base material;

[0036] 3) Press molding to make a green body;

[0037] 4) Machined into prefabricated shapes and sizes by lathe or grinder;

[0038] 5) Place the processed body in an atmosphere pressure sintering furnace for sintering;

[0039] 6) Carry out fine processing on the fired product to obtain the finished ceramic ring.

Embodiment 1

[0041] According to the total weight of solid matter, 375 grams of silicon nitride micropowder with an average particle size of 0.5 μm is used as a raw material (α-silicon nitride content accounts for 90% of the total weight), and 62.5 grams of alumina (purity 99.99%, average particle size 0.5 μm), 62.5 grams of yttrium oxide (purity 99.99%, average particle size 0.8 μm), using silicon nitride as the grinding medium, stirring in anhydrous ethanol abrasive for 4 hours, the solid content of the slurry is 20%, put After being dried in a drying oven at 60° C. for 2 hours, a cold isostatic press was used to granulate at 20 MPa to prepare silicon nitride particles with an average particle diameter of 160 μm.

[0042] The granulated silicon nitride particles were pressed at 40MPa cold isostatic pressure to form a green body that meets the size requirements. After mechanical processing, they were dried in an oven for 12 hours, and sintered at 1700°C under a nitrogen pressure of 2MPa H...

Embodiment 2

[0045] According to the total weight of solid matter, 475 grams of silicon nitride micropowder with an average particle size of 0.5 μm is used as a raw material (the content of α silicon nitride accounts for 90% of the total weight), and 12.5 grams of magnesium oxide (purity 99.99%, average particle size 0.5 μm), 12.5 grams of lanthanum oxide (purity 99.99%, average particle size 0.8 μm), using silicon nitride as the grinding medium, stirring in isopropanol abrasive for 40 hours, the solid content of the slurry is 40%, put After being dried in a drying oven at 120° C. for 10 hours, a cold isostatic press of 160 MPa was used to granulate to prepare silicon nitride particles with an average particle diameter of 300 μm.

[0046] The granulated silicon nitride particles were pressed at 400MPa cold isostatic pressure to form a green body that meets the size requirements. After mechanical processing, they were dried in an oven for 36 hours, and were sintered at 1850°C under a nitroge...

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Abstract

The invention relates to a preparation method of a silicon nitride ceramics ring for a polysilicon reduction furnace, comprising the following steps: weighing various raw materials, and stirring in media to obtain evenly mixed slurry; after the slurry is dried, prilling to prepare base stock; pressing and shaping to prepare a green body; processing by a lathe or a grinder into preset shape and size; sintering the processed green body into an atmosphere pressure sintering furnace; and carrying out finish machining to a sintered finished product to obtain the ceramics ring finished product. Thepreparation method has the beneficial effect that silicon nitride ceramics ring has good insulativity, high toughness, and good thermostability and antiknock characteristic, the service life can be prolonged, and added agglomerant is favourable for densification. The invention can satisfy environment use requirement of a polysilicon reduction furnace, has long service life and improves work efficiency.

Description

technical field [0001] The invention relates to a method for preparing a ceramic ring, in particular to a method for preparing a silicon nitride ceramic ring for a polysilicon reduction furnace, and belongs to the technical field of inorganic chemical materials. Background technique [0002] Polysilicon reduction furnace is a special equipment for refining polysilicon rods. At present, the silicon core breakdown start of polysilicon reduction furnaces at home and abroad mainly relies on electric radiation heaters to reduce the resistivity of the silicon core to meet the low-voltage start-up requirements. However, pure silicon has poor conductivity at room temperature and the resistivity is too large. It is regarded as an insulator, which leads to a long start-up time and affects production efficiency. Therefore, the new technology of using high-voltage start-up method is gradually becoming popular. Firstly, high-voltage breakdown is applied to make it a conductor with low r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/622C04B35/584
Inventor 邹景良丁艳张伟儒李新
Owner SINOMA SYNTHETIC CRYSTALS CO LTD
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