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Semiconductor testing apparatus with concentric probe seats

A technology of testing equipment and probe holders, which is applied in the direction of single semiconductor device testing, measuring electricity, measuring devices, etc., can solve the problems of difficult to further expand test specifications and cost, achieve rapid change of test specifications, improve competitiveness, reduce cost effect

Active Publication Date: 2012-08-08
KING YUAN ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The original machine with 256 input / output channels and 16 sets of DPS is difficult to further expand its test specifications due to limitations in the original software settings or hardware limitations
[0004] However, although there are currently modified machines to expand their test specifications
However, refitting requires a considerable cost, and if the functions of the new and old machines can be taken into account after refitting, the refitted machine will be able to exert its maximum effect

Method used

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  • Semiconductor testing apparatus with concentric probe seats
  • Semiconductor testing apparatus with concentric probe seats
  • Semiconductor testing apparatus with concentric probe seats

Examples

Experimental program
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Embodiment Construction

[0021] Please also see figure 1 and figure 2 , figure 1 It is an equipment perspective view of a preferred embodiment of the semiconductor testing equipment with concentric circle probe base of the present invention, figure 2 It is a schematic diagram of the test head in a position A according to a preferred embodiment of the present invention. The figure shows a base 1, on which is provided a carrying platform 11, and the carrying platform 11 is recessed with a receiving groove 111, which is mainly used to place the probe card 5, the small probe card 50, and the wafer to be tested, or other semiconductor or electronic components to be tested. In addition, there is a test head 2 which can be rotated by a rotating arm 6 to approach or move away from the base 1 . That is, the test head 2 is detachably disposed above the bearing platform 11 of the base 1 , and a test carrier board 21 is disposed below the test head 2 , which is a carrier board with circuit contacts.

[002...

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PUM

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Abstract

The invention relates to a semiconductor testing apparatus with concentric probe seats, which comprises a base, a measuring head, an external ring probe seat and an internal ring probe seat, wherein the internal ring probe seat is firstly sheathed on the internal ring surface of the external ring probe seat, the clamping groove of the internal ring probe seat is correspondingly connected to a radial convex column of the external ring probe seat, the external ring probe seat and the internal ring probe seat are arranged on a testing carrier plate of the measuring head, and a plurality of external ring probes of the external ring probe seat and a plurality of internal ring probes of the internal ring probe seat are respectively electrically connected with the testing carrier plate. Therefore, the internal ring probe seat and the external ring probe seat are combined or separated to achieve the effect of testing expansion, thus, two probe cards with different specifications can be selected for testing, and the goal of quickly changing test specifications can be achieved without changing other hardware, thereby enhancing the competitive power of the testing machine.

Description

technical field [0001] The invention relates to a semiconductor testing device with concentric circle probe bases, in particular to a semiconductor testing equipment suitable for expandable probe bases. Background technique [0002] According to the prior art, the test specifications of each semiconductor test equipment are almost fixed. For example, the common semiconductor testing equipment in the past had 256 input / output channels and 16 sets of DPS as the mainstream specifications. However, due to the ever-changing electronic products and the increasingly high degree of functional integration, the types of signals involved are becoming more and more complex. [0003] In order to meet the current industry needs to increase the test capacity, the test capability of the test machine is also continuously improved, so its specification has been gradually increased from the original 256 input / output channels and 16 sets of DPS to 512 input / output channels , and 32 groups of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/00G01R31/26G01R1/073
Inventor 陈峰杰
Owner KING YUAN ELECTRONICS