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End effector

An end-effector and carrier technology, applied in semiconductor/solid-state device manufacturing, conveyor objects, electrical components, etc., to solve problems such as movement becoming a bottleneck

Inactive Publication Date: 2011-02-16
XYRATEX TECH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, where HDDs are tested after certain manufacturing processes, the movement of HDDs into and out of the test station can become a bottleneck

Method used

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Embodiment Construction

[0021] The embodiments described below provide an end effector that enhances the movement of the disk or substrate throughout the manufacturing process. The end effector can access the disc in a vertical or horizontal position and move the disc to the horizontal or vertical position respectively. In addition, these embodiments can employ servo motors or stepper motors with feedback to quickly and smoothly transport the HDD from one planar orientation to another while reducing, minimizing or eliminating jerking. Jumping is a common phenomenon when using pneumatic air cylinders for motion control. Because jumping may cause damage to HDD, jumping is not good for HDD handling. However, past measures taken to mitigate runout have resulted in increased handling / delivery times. The end effector is also compliant or compliant with respect to the extension and retraction mechanism and electric motor that provide the pivotal movement. In addition, end effectors are suitable for use i...

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Abstract

An apparatus for transporting a substrate is provided. The apparatus includes an upper portion housing an electric motor, the electric motor having a drive shaft. A motor housing encloses the electric motor. A pivot bracket having a first end and a second end, where the first end of the pivot bracket is coupled to the drive shaft. The apparatus includes a lower portion having a top surface affixed to the second end of the pivot bracket. The lower portion includes a plurality of paddle assemblies each having support extensions extending though a bearing assembly of the lower portion. Each of the paddle assemblies has an independent drive assembly disposed between corresponding support extensions, wherein the lower portion translates between a vertical and horizontal orientation by pivoting around an axis of the driveshaft.

Description

Background technique [0001] Saving HDDs of less than a second in conveyance / shipping time for movement of hard disk drive disk (HDD) platters or substrates throughout the manufacturing process translates into higher throughput, which is a real gain competitive advantage. For example, where HDDs are tested after completing certain manufacturing processes, the movement of HDDs to and from the test station can become a bottleneck. Any improvement in handling / delivery time will result in a substantial improvement in yield. [0002] Therefore, there is a need for hard drive manufacturers to provide a tool that minimizes or reduces handling / shipping time. Contents of the invention [0003] Broadly speaking, the present invention meets these needs by providing an end effector that reduces transit time. It should be appreciated that the invention can be implemented in numerous ways, including as a method or a system. Several inventive embodiments of the present invention are des...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L21/68
CPCH01L21/68707Y10S414/141H01L21/67742H01L21/67784
Inventor J·贾米森F·英S·桑德拉拉简T·克里格S·贝伦基J·柯简吉安
Owner XYRATEX TECH LTD
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