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A technology for mounting tables and brackets, applied in the direction of conveyor objects, optics, instruments, etc., can solve problems such as unsmooth transmission, falling of glass substrates and brackets, damage to glass substrates and brackets, etc.
Inactive Publication Date: 2013-07-03
TERASEMICON CO LTD
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Abstract
Description
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Problems solved by technology
Otherwise, the glass substrate and the holder may collide with the holder mounting table and / or the substrate loading tray during the conveying process, causing the glass substrate and the holder to be damaged, or an accident in which the glass substrate and the holder fall from the transfer arm, etc., causing The problem with the transfer process is not smooth
Method used
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Examples
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no. 1 example
[0071] figure 1 is a side view showing the structure of the rack mounting table 100 according to the first embodiment of the present invention.
[0072] figure 2 is a plan view showing the structure of the rack mounting table 100 according to the first embodiment of the present invention.
[0073] refer to figure 1 The bracket mounting table 100 may include a basic frame 50 , a bottom plate 110 , a pole 120 , a support pin 130 , a bracket 140 , an alignment rotation shaft 150 , a rotation actuator 160 , and an alignment portion 200 .
[0074] First, the basic frame 50 plays a role of supporting the rack mounting table 100 . The basic frame 50 may be constituted by including a horizontal frame 52 installed on the ground and supporting the rack mounting table 100 from below, and a vertical frame 54 aligned with the rack mounting table 100 described later. The rotation shaft 150 is vertically arranged in parallel and is supported to align the rotation shaft 150 .
[0075] T...
no. 2 example
[0115] Figure 8 is a plan view showing the structure of the rack mounting table 100a according to the second embodiment of the present invention.
[0116] First of all, the bracket mounting table 100a may include a basic frame 50, a bottom plate 110, a pole 120, a support pin 130, a bracket 140, an alignment rotation shaft 150, a rotation actuator 160, a bracket alignment part 300, and a glass alignment part 400. constitute.
[0117] Here, since the structure of the basic frame 50, the bottom plate 110, the strut 120, the support pin 130, the rotary actuator 160, and the alignment rotary shaft 150 are the same as those of the above-mentioned first embodiment of the present invention, in this embodiment A detailed description thereof is omitted.
[0118] refer to Figure 8 , the rack aligning portion 300 plays a role of aligning the racks 140 at predetermined positions in the rack mounting table 100a. The rack alignment unit 300 is connected to the alignment rotation shaft...
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Abstract
Disclosed is a holder stage for aligning glass substrates and / or holders such that the glass substrates are arranged and aligned safely on the holders and loaded to a substrate boat in a substrate processingsystem. The holder stage (100) according to the present invention is a holder stage loaded with and accommodates holders (140) and glass substrates (10) corresponding to the respective holders (140), wherein the holder stage (100) includes: an alignment unit (200) for aligning the holders (140) and the glass substrates (10) at the same time; and an alignment unit rotating unit (150) for rotating the alignment unit
Description
technical field [0001] The present invention relates to a bracket mounting table, and particularly relates to arranging the positions of glass substrates and / or brackets in a substrate processingsystem responsible for the vapor deposition process or annealing process in the manufacturing process of flat panel displays so that the glass substrates can be mounted in an array The state on the rack is loaded onto the rack mount table on the substrate loading tray. Background technique [0002] Substrate processing systems used in the manufacture of flat panel displays are roughly divided into vapor deposition equipment and annealing equipment. [0003] The evaporation device is a device responsible for the process of forming the transparent conductive layer, insulating layer, metal layer or silicon layer that constitute the core structure of the flat panel display. As the vapor deposition device, there are chemical vapor deposition devices such as LPCVD (low pressure chemical ...
Claims
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Application Information
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