Glass substrate manufacturing method, glass substrate polishing method, glass substrate polishing apparatus and glass substrate

一种玻璃基板、研磨装置的技术，应用在研磨装置、制造基底层、磨削自动控制装置等方向，能够解决不能精度控制板厚、传感器检测部位污染等问题，达到提高品质特性和品质的稳定性、提高研磨加工精度的效果

Inactive Publication Date: 2011-04-20
AGC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0012] However, in the above-mentioned existing method (2), it is necessary to spend the time and cost of installing the plate thickness measuring mechanism on the grinding device. Due to the vibration of the device, the influence of processing on the temperature rise of the device parts, and the pollution of the sensor detection position, The problem of not being able to control the plate thickness with high enough precision

Method used

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  • Glass substrate manufacturing method, glass substrate polishing method, glass substrate polishing apparatus and glass substrate
  • Glass substrate manufacturing method, glass substrate polishing method, glass substrate polishing apparatus and glass substrate
  • Glass substrate manufacturing method, glass substrate polishing method, glass substrate polishing apparatus and glass substrate

Examples

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Embodiment

[0153] The following examples and comparative examples are given to further illustrate the present invention, but the present invention is by no means limited thereto. In this example, using Figure 1B The double-sided grinding device 11 of the key structure is shown.

[0154] Figure 9A This is the first example of a flowchart showing the manufacturing process of a glass substrate for a magnetic recording medium and a magnetic disk. The manufacturing process of the glass substrate for magnetic recordings is the process of P1-P9. At the end stage of process P9, the glass substrate for magnetic recording media which is the 1st final product is manufactured. And the magnetic disk which is the 2nd final product is manufactured by passing through the magnetic disk manufacturing process P10 about the glass substrate for magnetic recording media.

[0155] (Shaping process P1)

[0156] Process the silicate glass plate formed by the float method into a ring-shaped circular glass ...

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Abstract

The present invention provides a glass substrate manufacturing method, a glass substrate polishing method, a glass substrate polishing apparatus and a glass substrate, which can improve polishing precision of the glass substrate. The polishing apparatus is provided with the following components: a motor which drives an upper platform (40); a motor which drives a lower platform (30); a motor which drives a sun gear that is provided at the inside of the inner periphery of the lower platform (30); a motor which drives an internal gear that is provided at the outside of the outer periphery of the lower platform (30); and a control part (90) which controls the motors. The control part (90) polishes the glass substrate through controlling the driving of the motors. The invention is characterized in that the control part (90) adjusts the polishing of the glass substrate based on the electrical power or electrical power amount required for driving the motors.

Description

technical field [0001] The present invention relates to a technique for controlling polishing of a glass substrate with high precision. Background technique [0002] Conventionally, when polishing a glass substrate, the state of the polishing device and the object to be polished during the polishing process are accurately grasped, and the polishing process of the glass substrate is controlled based on the obtained information to perform the polishing process with high precision. Research. [0003] Among them, the method of polishing the glass substrate while controlling the amount of polishing of the glass substrate with high precision has a great influence on the plate thickness, which is an important quality characteristic required for glass substrate products, and various methods are being studied. [0004] For example, in glass substrates for magnetic recording media, with the increase in recording density in recent years, the requirements for the processing accuracy of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/04B24B51/00B24B7/24B24B37/07B24B37/08B24B49/10
CPCB24B37/042G11B5/7315B24B37/005B24B49/10B24B37/08G11B5/8404G11B5/73921Y10T428/24479
Inventor 木村宏池田训仁展山口龙
Owner AGC INC
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