Coupling permeation efficiency optimization system of near field scanning optical microscope (NSOM)

Abstract

The invention provides a coupling permeation efficiency optimization system of a near field scanning optical microscope (NSOM) and an optimization method thereof, relating to the field of scanning probe microtechnique. The optimization system comprises a computer, a detector, a collection mirror, a probe, a focusing mirror, a spatial light modulation instrument and a driver, wherein the computer, the detector, the spatial light modulation instrument and the driver form a closed loop circuit. In the system, the spatial light modulation instrument is introduced to modulate the light field distribution of an incident light field, so that the modulated light field is coupled with the probe, thereby having highest coupling permeation efficiency, and being incapable of reducing other performances of a microscope system.

Description

technical field

[0001] The invention relates to the technical field of scanning probe microscopy, in particular to a system for optimizing coupling and transmission efficiency in the illumination mode of a near-field scanning optical microscope. Background technique

[0002] Near-field scanning optical microscope (NSOM) is a kind of scanning probe microscope. It consists of a laser and a probe to form a "local light source", a "scanning platform" with an ultra-fine movement device, and a microscopic objective lens. The "optical magnification system" consists of three parts. The near-field microscope uses a nanometer local light source to illuminate the sample at a nanoscale near-field distance, and the local light signal from the sample is amplified by the microscope objective lens and received by a photoelectric receiver. NSOM uses scanning technology to make the local light source illuminate the sample in a point-by-point grid pattern, and then the photoelectric receiver ...

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