Ion beam figuring processing method for aspheric surface processing

A processing method and ion beam technology, applied in the direction of manufacturing tools, glass manufacturing equipment, glass cutting devices, etc., can solve the problems of complex operation, high preparation cost, processing efficiency and processing effect to be improved

Inactive Publication Date: 2011-06-15
NAT UNIV OF DEFENSE TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, the five-axis linkage motion system is not only complicated to operate and high in ma

Method used

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  • Ion beam figuring processing method for aspheric surface processing
  • Ion beam figuring processing method for aspheric surface processing
  • Ion beam figuring processing method for aspheric surface processing

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Embodiment

[0057] The ion beam polishing process of this embodiment is carried out on an ordinary ion beam polishing equipment, and its process parameters are: the working gas is argon, and the working vacuum is 0.8×10 -2 Pa, ion energy 800eV, beam current 25mA. The optical element to be processed is an off-axis aspheric mirror with a size of 250mm×90mm, and the material is ordinary glass ceramics; the off-axis distance of the mirror surface is 16mm, the curvature radius of the vertex is 285mm, and the eccentricity is 0.93. The mirror surface has undergone traditional optical polishing, but the surface shape error is still large, which cannot meet the requirements. The following uses the ion beam modification processing method of the present invention to carry out ion beam modification processing to the aspheric mirror, and the specific operation steps are as follows:

[0058] 1. Detection of surface error: Use laser interferometer to detect the surface error of the mirror surface of th...

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Abstract

The invention discloses an ion beam figuring processing method for aspheric surface processing, comprising the following steps of: firstly, detecting and testing to acquire a facial-contour error distribution data R and a removal function P; then, establishing an ion beam figuring processing path, and measuring and calculating incident angles phi of various points of an optical curved surface; calculating a resident time density function and a material removal amount M by using a calculation model and a resident time iterative algorithm, and calculating the resident times of ion beams in all processing points; carrying out linear triaxial-linkage numerical-control figuring processing on the optical surface of an optical element to be processed according to the established processing path and the resident time; then, carrying out facial-contour error detection, correcting the P according to the M and the facial-contour error distribution data before and after the processing, repeating the previous steps by using the corrected removal function P for iterative processing, and ending the processing till the requirement for facial-contour convergence precision is met. The processing method provided by the invention has the advantages of good stability, high processing precision, strong controllability and low requirement for equipment.

Description

technical field [0001] The invention relates to the technical field of optical element processing, in particular to an ion beam modification processing method for a curved optical element. Background technique [0002] Ion beam modification is a new technology applied to the deterministic processing of optical parts. Ion beam modification is to use the ion beam emitted by the ion source to bombard the optical mirror in a vacuum environment, and use the physical sputtering phenomenon generated by the ion bombardment to remove the material on the surface of the optical part. Ion beam modification has nanometer-level processing precision, and is a high-certainty, high-stability and non-contact processing method. Ion beam modification overcomes the disadvantages of edge effect, tool wear and pressure load in the traditional modification process. [0003] Such as figure 1 As shown in Figure A in the figure, when the current ion beam modification processing method realizes the ...

Claims

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Application Information

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IPC IPC(8): C03B33/02
CPCY02P40/57
Inventor 周林戴一帆解旭辉廖文林沈永祥袁征
Owner NAT UNIV OF DEFENSE TECH
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