Mass body applicable to micro-electromechanical sensor and three-axis micro-electromechanical sensor using same

Abstract

The invention relates to a three-axis micro-electromechanical sensor. The three-axis micro-electromechanical sensor comprises a first-axis fixed electrode, a second-axis fixed electrode, a third-axis fixed electrode, a movable electrode frame, a spring and a fixed column, wherein the movable electrode frame comprises a first-axis movable electrode, a second-axis movable electrode, a third-axis movable electrode and a connecting element for connecting the first-axis movable electrode, the second-axis movable electrode and the third-axis movable electrode together; the first-axis movable electrode and the first-axis fixed electrode form a first capacitor on a first axis; the second-axis movable electrode and the second-axis fixed electrode form a second capacitor on a second axis; the third-axis movable electrode and the third-axis fixed electrode form a third capacitor on a third axis; the connecting element comprises a central mass body which is connected with the first-axis movable electrode, the second-axis movable electrode or the third-axis movable electrode and is provided with an outer ring and a first connecting section connected with the adjacent edge of the outer ring; the spring is connected with the movable electrode frame; the fixed column is connected with the spring; and the first axis, the second axis and the third axis are not parallel to one another to define a three-dimensional coordinate system.

Description

technical field [0001] The invention relates to a mass body suitable for a microelectromechanical sensor and a three-axis microelectromechanical sensor using the mass body. Background technique [0002] MEMS components have various applications, one of which is to make capacitive sensors such as accelerometers, microphones, etc. There are two types of capacitive sensors in the prior art: in-plane sensors and out-of-plane sensors. The former senses capacitance changes in the horizontal direction (x-y plane), and the latter senses changes in the vertical direction ( The change in capacitance on the z-axis). For prior art on in-plane sensors and their manufacturing methods, for example, refer to US Patent Nos. 5,326,726, 5,847,280, 5,880,369, 6,877,374, 6,892,576, and 2007 / 0180912. Regarding the prior art of out-of-plane sensors and their manufacturing methods, for example, refer to US Patent Nos. 6,402,968, 6,792,804, 6,845,670, 7,138,694, and 7,258,011. But so far, there i...

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Problems solved by technology

But so far, there is no sensor that can simultaneously sense capacitance changes in three axes

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