Oil shielding device for evaporation
An oil shielding and oil-gas technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of uncontrolled oil flow, high use cost, and rapid oil aging, and achieve cost reduction, Aging time becomes longer and the effect of improving product quality
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[0012] An oil shielding device for vapor deposition of the present invention, such as figure 1 , figure 2 , image 3 As shown, it includes an oil-gas tank 3 divided into an upper chamber 2 and a lower chamber 6, a solenoid valve 1 connecting the upper chamber 2 and the lower chamber 6, and a heat pipe 5 for heating the upper chamber 2 and the lower chamber 3 respectively, and the oil-gas tank 3 It is filled with oil, and a heat insulating board 4 is provided between the upper chamber 2 and the lower chamber 6 . The heating pipe 5 for heating the lower chamber 6 is located outside the lower chamber 6 and indirectly heats the oil in the lower chamber 6 . There are three solenoid valves 1, which are evenly distributed on the two ends and the center of the outer wall of the oil-gas tank 3.
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