Ultraprecise piezoelectric positioning platform

A positioning platform and ultra-precision technology, which is applied to large fixed members, metal processing mechanical parts, metal processing equipment, etc., can solve the problems of high cost, multi-degree-of-freedom ultra-precision positioning platform occupying space, complex structure, etc.

Active Publication Date: 2011-07-06
METAL INDS RES & DEV CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, none of the existing fine-tuning devices of the above-mentioned patents can achieve non-equal and non-linear micro-movements.
In addition, in the prior art, including the existing fine-tuning device of the abov

Method used

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  • Ultraprecise piezoelectric positioning platform
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  • Ultraprecise piezoelectric positioning platform

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Embodiment Construction

[0061] In order to make the object, technical solution and advantages of the present invention clearer, the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings. Here, the exemplary embodiments and descriptions of the present invention are used to explain the present invention, but not to limit the present invention.

[0062] figure 1 A three-dimensional exploded schematic view showing an ultra-precise piezoelectric positioning platform according to a preferred embodiment of the present invention; figure 2 A side view of the first micro-motion unit of the first micro-motion module of the ultra-precise piezoelectric positioning platform showing a preferred embodiment of the present invention; image 3 A side view of the second micro-motion unit of the second micro-motion module of the ultra-precision piezoelectric positioning platform showing a preferred embodiment of the present invention; Figure 4 A t...

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Abstract

The invention discloses an ultraprecise piezoelectric positioning platform. A first micromotion module, a second micromotion module and a third micromotion module are matched, and are displaced through a plurality of piezoelectric elements, so that the ultraprecise piezoelectric positioning platform can realize multiaxial, non-equivalent circle and nonlinear micromotion adjustment functions, and achieve a high-precision positioning effect. Besides, the first micromotion module, the second micromotion module and the third micromotion module are combined in a reverse cascade combination mode, and the ultraprecise piezoelectric positioning platform is more flattened, so the volume and the height of the ultraprecise piezoelectric positioning platform are effectively reduced. Moreover, by a modularization design, the ultraprecise piezoelectric positioning platform has a few assembled parts, and is convenient to disassemble and easy to maintain.

Description

technical field [0001] The invention relates to a positioning platform, in particular to an ultra-precise piezoelectric positioning platform. Background technique [0002] With reference to China Taiwan Patent Announcement No. 589240, it discloses a non-linear rotary fine-tuning device with nanometer / micron rotary function. The existing non-linear rotary fine-tuning device includes an arc or circular rotary table, at least A set of displacement driving components installed inside the rotary table and an arc-shaped base or pivot that guides or supports the rotary table to generate rotation, so that the corresponding base or pivot produces a slight movement, so that the The circular or arc-shaped rotary table performs non-linear nano / micron level displacement. [0003] With reference to China Taiwan Patent Announcement No. 567122, it discloses a universal rolling fine-tuning device with Nai / micron rotation function. A spherical rotating table and at least six sets of displac...

Claims

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Application Information

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IPC IPC(8): B23Q1/34
Inventor 洪国凯游源成刘冠志黄加助
Owner METAL INDS RES & DEV CENT
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