Substrate-transferring device, substrate-processing apparatus having same, and method of transferring substrate using substrate-transferring device

A transmission device and processing equipment technology, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of limited installation machinery

Active Publication Date: 2011-08-17
SEMES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these chuck components are required to be provided integrally to each arm in a single body, so their mounting is mechanically limited

Method used

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  • Substrate-transferring device, substrate-processing apparatus having same, and method of transferring substrate using substrate-transferring device
  • Substrate-transferring device, substrate-processing apparatus having same, and method of transferring substrate using substrate-transferring device
  • Substrate-transferring device, substrate-processing apparatus having same, and method of transferring substrate using substrate-transferring device

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Embodiment Construction

[0035] Preferred embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. However, this invention may be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0036] Exemplary embodiments of the present invention will be described below with reference to the accompanying drawings.

[0037] figure 1 is a schematic diagram illustrating a substrate processing system 1000 according to an embodiment of the present invention.

[0038] refer to figure 1 , the substrate processing system 1000 may include a loading / unloading unit 110 , an index robot 200 , a buffer unit 300 , a main transfer robot 500 , a plurality of processing chambers 600 , and first and second control units 710 and 720 .

[0039...

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Abstract

Provided is a substrate-transferring device including a plurality of horizontally movable arms, a body, and a plurality of guides. The plurality of horizontally movable arms, each is adapted for loading a substrate. The body is coupled to the arms and moving the respective arms horizontally. The plurality of guides are fixed to the body, and disposed respectively behind the arms, and guide positions of substrates loaded on the respectively corresponding arms when the arms move rearward. Accordingly, the substrate-transferring device prevents a substrate from being removed while transferring the substrate and transfers a substrate stably, so as to improve transfer efficiency.

Description

technical field [0001] The present invention disclosed herein relates to an apparatus for manufacturing a semiconductor substrate, and more particularly, to a substrate transfer apparatus, a substrate processing apparatus having the substrate transfer apparatus, and a method of transferring a substrate using the substrate transfer apparatus . Background technique [0002] During the substrate manufacturing process, deposition and etching of dielectric and metal materials, application and development of photoresist, asher process, etc. are repeated many times to achieve finely arranged patterns. However, although these processes including etching or stripping processes are performed, foreign substances remain in the substrate. Processes for removing these foreign substances include cleaning with deionized water or chemicals. [0003] Substrate cleaning apparatuses that perform cleaning processing are classified into batch substrate cleaning apparatuses and individual substr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/687
CPCH01L21/67781H01L21/67303H01L21/67766
Inventor 金大镐洪祥硕朴周缉朴善用
Owner SEMES CO LTD
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