Method for detecting curvature radius of optical spherical surface

A technology of curvature radius and detection method, which is applied in the direction of optical devices, measuring devices, instruments, etc., can solve problems such as measurement and error of spherical mirrors with large curvature radii, and achieve simple data processing and mathematical operations, short measurement time, and experimental results. Simple and easy to operate effect

Inactive Publication Date: 2011-08-31
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The present invention provides a method for detecting the radius of curvature of an optical sphere in order to solve the problem that errors exist in existing methods for

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  • Method for detecting curvature radius of optical spherical surface
  • Method for detecting curvature radius of optical spherical surface
  • Method for detecting curvature radius of optical spherical surface

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specific Embodiment approach 1

[0017] Specific implementation mode 1. Combination Figure 1 to Figure 3 Describe this embodiment, a kind of detection method of the radius of curvature of an optical spherical mirror, this method is realized by the following steps:

[0018] Step 1. Adjust the relative position of the target ball 3 and the interferometer 1, and judge whether the center of curvature of the target ball 3 coincides with the wavefront focus of the interferometer 1 exiting the spherical mirror to be tested; if yes, then perform step 2; if not, Then continue to adjust the relative position of the target ball 3 and the interferometer 1;

[0019] Step 2, the laser tracker 2 measures the center of curvature coordinates of the target ball 3, and the center of curvature coordinates of the target ball 3 are the coordinates of the focal point of the outgoing wavefront of the interferometer 1;

[0020] Step 3, repeatedly adjust the relative position of the spherical mirror 7 to be measured and the interfer...

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Abstract

The invention discloses a method for detecting the curvature radius of an optical spherical surface, relating to a method for measuring the curvature radius of the optical spherical surface and aiming to solve the problems of errors existing in the conventional method for measuring the curvature radius of the optical spherical surface and difficulty in accurately realizing measurement of a spherical mirror with a large curvature radius by adopting the conventional measuring method. The method comprises the following steps of: adjusting relative positions of a target sphere and an interferometer and judging whether the curvature center of the target sphere is overlaid with the front focal point of the emergent waves of the interferometer or not; if so, measuring the curvature center coordinate of the target sphere by using a laser tracking instrument, wherein the curvature center coordinate of the target sphere is the coordinate of the front focal point of the emergent waves of the interferometer; if not, continually adjusting the relative positions of the target sphere and the interferometer until the spherical mirror to be detected reaches a zero stripe interference state; measuring the position coordinates of a plurality of points on the spherical mirror to be detected by using the laser tracking instrument; and averaging, counting and operating a plurality of values to obtain the curvature radius of the optical spherical mirror to be detected. The method is suitable for the technical field of optical measurement.

Description

technical field [0001] The invention relates to a method for measuring the radius of curvature of an optical spherical surface. Background technique [0002] Optical spherical mirrors include spherical lenses and spherical mirrors, which are the main components of imaging optical systems, and the key to ensuring their quality is to ensure the accuracy of their curvature radius during their development. [0003] At present, there are many methods for measuring the radius of curvature of an optical spherical surface. The traditional methods include the spherometer method and the template method. These traditional methods are simple in equipment and convenient in testing, and are suitable for on-site inspection. However, there are disadvantages such as subjectivity, quantitative difficulty, and low sensitivity. Newton ring equal thickness interferometry has always been one of the most important and widely used methods in the measurement of the radius of curvature of optical s...

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Application Information

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IPC IPC(8): G01B11/255
Inventor 王孝坤李锐刚郑立功张学军
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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