Precise motion platform with vibration dampers

A vibration damping device and precision motion technology, applied in the field of motion platforms, can solve problems such as high manufacturing cost and interference, and achieve the effects of reducing manufacturing costs, increasing degrees of freedom, and reducing manufacturing precision requirements
CN102207240AInactive Publication Date: 2011-10-05SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
Publication Date
2011-10-05
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a precise motion platform with vibration dampers. The precise motion platform comprises a base, a miscropositioner, vibration dampers, horizontal motors and vertical motors, wherein the number of the vibration dampers is three or more than three, the vibration dampers are positioned between the base and the miscropositioner in a polygon form to support the miscropositioner, the number of the horizontal motors and the vertical motors is respectively three or more than three, and the horizontal motors and the vertical motors are positioned between the base seat and the miscropositioner, and are distributed along a circular path to be staggered with the vibration dampers for actively controlling the position and the speed of the miscropositioner in the horizontal direction and the vertical direction. According to the precious motion platform with the vibration dampers, provided by the invention, the vibration dampers and the motors are separately designed, thereby the design freedom of degree is achieved and the cost is reduced. Aerostatic bearings are applied to the structures of the vibration dampers, and no interval sealing is needed, thereby the requirements on manufacturing accuracy and the manufacturing cost are decreased.
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Description

technical field

[0001] The invention relates to a motion platform, and in particular to a precision motion platform with a shock absorbing device. Background technique

[0002] Precision motion platforms, such as semiconductor exposure equipment, precision testing equipment, etc., include bases and machine loads in their components. The base is fixed to the ground or a platform. The machine load has a mechanical frame that supports the vibration-sensitive parts of the machine, such as the workpiece table, mask table, exposure objective, and some measurement equipment in a lithography machine. Between the base and the machine load is a set of vibration-damping support equipment. Here, there are two main functions of the vibration-absorbing support equipment. One is for support and the other is for damping.

[0003] There are many factors that affect the vibration of the base, mainly including the introduction of foundation vibration, the external reaction force and moment...

Claims

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