Deposition evaporation source
An evaporation source and volume technology, applied in vacuum evaporation coating, sustainable manufacturing/processing, final product manufacturing, etc., can solve the problems of different evaporation rates, inconsistent working atmosphere of evaporated materials, poor photoelectric consistency of film uniformity, etc. , to achieve consistent photoelectric characteristics and high-quality effects
Inactive Publication Date: 2011-10-12
WUXI SUNTECH POWER CO LTD +1
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Problems solved by technology
[0010] However, the CSS method faces some problems in the process of mass production
Using this method for industrial thin film production, there will be problems of thin film uniformity and poor photoelectric consistency on the entire thin film surface, which will affect the quality of deposited thin films
First, the inconsistent temperature of the substrate surface will lead to different evaporation rates of the evaporation materials on the evaporation source, resulting in inconsistent deposition thickness of the deposited film; second, the inconsistent working atmosphere of the evaporated material during the evaporation process will affect the photoelectricity of the deposited film. characteristic
Method used
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[0034] Before any embodiments of the invention are explained in detail, it is to be understood that the invention is not limited in its application to the details of construction and the arrangement of parts set forth in the following description or shown in the following drawings. The invention is capable of other embodiments and of being practiced or carried out in various ways. Also, it is to be understood that the phraseology and terminology used herein are for the purpose of description and should not be regarded as limiting.
[0035] figure 1 A deposition evaporation source arrangement according to one embodiment of the invention is shown. Such as figure 1 As shown, the evaporation source device 100 includes a heating plate 102, a heating wire 104 arranged under the heating plate 102, and an evaporation material (not shown) arranged on the heating plate 102. on heating plate. Wherein the heating plate 102 is provided with a plurality of grooves, such as the groove 10...
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Abstract
The invention relates to a deposition evaporation source, which comprises a heating device, a heating plate and an evaporating material, wherein the heating plate is arranged above the heating device; the evaporating material is arranged on the heating plate; and channels passing through the heating plate are uniformly formed on the heating plate. According to the deposition evaporation source provided by the invention, the problem of poor photoelectric characteristic of a deposition film, which caused by inconsistent working atmosphere of an evaporation substance in the evaporating process, can be solved effectively. According to the deposition evaporation source provided by the invention, the structure and photoelectric characteristic of the deposition film can be kept consistent, and a high-quality deposition film is obtained.
Description
technical field [0001] The invention relates to thin-film solar cell preparation technology, in particular to near-space sublimation deposition equipment and its deposition evaporation source in the thin-film solar cell preparation process. Background technique [0002] Solar energy is the most important basic energy among all kinds of renewable energy. Biomass energy, wind energy, ocean energy, water energy, etc. all come from solar energy. It is a solar thermal utilization technology to convert solar radiation energy into thermal energy through a conversion device; The device that converts solar radiation energy into electrical energy belongs to solar photovoltaic power generation technology. Photoelectric conversion devices usually use the principle of photovoltaic effect of semiconductor devices to perform photoelectric conversion, so it is also called solar photovoltaic technology. [0003] Since the 1970s, in view of the limited supply of conventional energy and the in...
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IPC IPC(8): H01L31/18H01L31/0296H01L31/04C23C14/24
CPCY02P70/50
Inventor 雷智邹志杰
Owner WUXI SUNTECH POWER CO LTD