Elastic tensioning device for growth of diamond film electrode

Abstract

The invention relates to an elastic tensioning apparatus for growth of a diamond film electrode, the device comprises a base plate (5) and a substrate work bench (21), and is characterized in that two ends of a heated filament (20) are fixed in a corresponding left molybdenum electrode (2) and a corresponding right molybdenum electrode (3), the left molybdenum electrode (2) and the right molybdenum electrode (3) are respectively arranged on the top of a corresponding left elastic support (1) and a right elastic support (4), the lower part of the left elastic support (1) and the right elastic support (4) are symmetrically arranged on the base plates(5) at two sides of the substrate work bench (21); the elastic coefficient of the left elastic support (1) and the right elastic support (4) isk=(1 to 3) n*r<2>, wherein r=0.1 to 1mm; the distance L(mm) between two ends forming by retracting inward of the left elastic support (1) and the right elastic support (4) satisfies a following relation with a work length L1(mm) of heated filament: L1=5+1.05L. The electrode of the present invention has simple structure and low production cost, heated filament is capable of maintaining a parallel straight state during growth process of diamond without generating tensile failure of heated filament, the uniformity of the substrate temperature field can be improved and the uniformity of depositional CVD diamond membrane can be raised.

Description

technical field [0001] The invention relates to a preparation device of a hot-wire CVD diamond film, in particular to a hot-wire electrode for stably growing a CVD diamond film, in particular to an elastic tensioning device for a diamond film growth electrode. Background technique [0002] The mechanical, thermal, acoustic, electrical, optical and chemical properties of chemical vapor deposition (referred to as CVD) diamond have reached or approached those of natural diamond, and have broad application prospects in today's high-tech fields. The preparation of diamond film by hot wire CVD has the advantages of fast growth rate, strict control of growth condition parameters, wide reaction chamber pressure range, large film forming area, small equipment investment, simple structure, and industrial production. The CVD method is currently one of the most commonly used methods for preparing CVD diamond films. When the diamond film is deposited by the hot wire CVD method, the subs...

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Problems solved by technology

[0006] The purpose of the present invention is to solve the problem that the hot wire of the existing CVD diamond film deposition device is easy to sag under the vacuum high temperature state, resulting in poor deposition uniformity, while the existing tensioning device has complex structure, inaccurate adjustment, and easy wire jamming. An elastic tensioning device for a diamond film growth electrode, using the left and right electrodes with the same structure to be symmetrically installed on both sides of the substrate workbench. The process is always kept straight, on the other hand, the elongation of the hot wire at both ends of the substrate is always consistent, so that the temperature field of the substrate remains uniform

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