Three-degree-of-freedom piezoelectric drive platform

A piezoelectric drive, degree of freedom technology, applied in the direction of worktables, large fixed members, metal processing machinery parts, etc., can solve the problems that it is difficult to reach the "sub-nanometer" level and low positioning accuracy

Inactive Publication Date: 2013-06-19
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, the driving and positioning devices used in various fields are mainly traditional mechanical transmissions, which inevitably have gaps and low positioning accuracy, and it is difficult to reach the "sub-nanometer" level

Method used

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  • Three-degree-of-freedom piezoelectric drive platform
  • Three-degree-of-freedom piezoelectric drive platform
  • Three-degree-of-freedom piezoelectric drive platform

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Embodiment Construction

[0040] The structure and working principle of the present invention will be described in detail below with reference to the drawings and specific embodiments.

[0041] Such as figure 1 As shown, the present invention provides a three-degree-of-freedom piezoelectric drive platform, including a base 7, two side walls 1, a long beam 8, at least two piezoelectric stators 4 (four in this embodiment), an upper guide rail 3. The middle guide rail 5 and the lower guide rail 6 will be introduced separately below.

[0042] Such as Figure 8 As shown, the base 7 is a rectangular plate with a circular groove 71 in the center, and at least two threaded holes are provided in symmetrical directions on the two opposite short sides. In this embodiment, three threaded holes 72 are provided. These threaded holes 72 are in order to fix the side wall 1, and the threaded holes 72 are located on the short side to make the rotation range of the lower guide rail 6 larger, and avoid the influence of...

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Abstract

The invention discloses a three-degree-of-freedom piezoelectric drive platform, which comprises a base, a long beam, at least two piezoelectric stators, an upper guide track, a middle guide track and a lower guide track. The lower guide track is arranged on the base, the middle guide track is arranged above the lower guide track in a transversely slidable manner, and the upper guide track is arranged above the middle guide track in a longitudinally slidable manner; the long beam is fixed above the base, the top ends of the piezoelectric stators are fixed to the long beam, and the bottom ends of the piezoelectric stators are in contact with a top face of the upper guide track; and the piezoelectric stators comprise a long screw bolt, an upper pressing block, four bent vibrating piezoelectric ceramic plates, two bisection-type electrode sheets, three electrode sheets, two longitudinal vibrating piezoelectric ceramic plates and a lower pressing block, wherein the long screw bolt is only in contact with penetrating holes of a first, a second and a third electrode sheets, so that the upper pressing block and the lower pressing block are communicated with the ground, and the rest penetrating holes of the bisection-type electrode sheets and the piezoelectric ceramic plates are all not in contract with the long screw bolt. The drive platform has improved platform positioning precision.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric machinery, and relates to a driving positioning device, in particular to a three-degree-of-freedom piezoelectric driving platform. Background technique [0002] At present, the driving and positioning devices used in various fields are mainly traditional mechanical transmissions, which inevitably have gaps and low positioning accuracy, and it is difficult to reach the "sub-nanometer" level. The piezoelectric drive platform utilizes the inverse piezoelectric effect of piezoelectric materials, and the two vibration modes of the stator, longitudinal vibration and bending vibration, are spatially different. , if the two vibrations also differ in time , it can be superimposed into the elliptical micro-vibration at the end of the stator, and the displacement is generated by the mutual friction between the stator and the mover. The slight vibration of the stator can cause a small displacement...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25H1/02B23Q1/25G12B5/00
Inventor 金家楣吴飞陈小建泮振锋
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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