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MEMS Condenser Microphone

A technology of micro-electromechanical capacitors and microphones, which is applied in the direction of electrostatic transducers and microphones, and can solve problems such as insufficient accuracy, microphone failure, and difficulty in estimating the distance between the diaphragm and the back plate.

Active Publication Date: 2011-11-30
NATIONAL TSING HUA UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Since the flexible diaphragm cannot keep parallel to the back plate at any time during deformation, it is not easy to estimate the distance change between the diaphragm and the back plate, and the accuracy is relatively insufficient
Furthermore, since the sensitivity of the microphone is directly proportional to the driving voltage, when the driving voltage is increased to increase the sensitivity, the existing flexible diaphragm is prone to collapse effect, which will cause the microphone to fail when it is attached to the back plate.

Method used

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Examples

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Embodiment Construction

[0020] The present invention proposes a micro-electromechanical condenser microphone, which utilizes a rigid diaphragm and an elastic element, so that the rigid diaphragm can be parallel and displaced relative to a back plate. Relevant detailed description and technical contents of the present invention, now cooperate with accompanying drawing to illustrate as follows:

[0021] see Figure 3-1 and Figure 3-2 As shown, in an embodiment of the present invention, the proposed MEMS condenser microphone 20 includes a base 21 , a rigid diaphragm 22 , an elastic element 23 and a back plate 24 . Wherein, the back pole plate 24 is arranged on the base 21, and the back pole plate 24 is provided with a plurality of sound holes 25 passing through the back pole plate 24; the position of the base 21 corresponding to the back pole plate 24 includes a back cavity 26, The sound holes are connected to the back cavity 26 . The rigid diaphragm 22 is fixed to the elastic element 23 and is para...

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Abstract

The invention provides a Micro-Electro-Mechanical condenser microphone. A diaphragm of the microphone is a rigid diaphragm which is arranged on an elastic element, thus with the help of an elastic effect of the elastic element, the rigid diaphragm shifts parallel to a normal vector direction of a back plate, thus capacitance change between the rigid diaphragm and the back plate is obtained.

Description

technical field [0001] The invention relates to a microelectromechanical condenser microphone, in particular to a microelectromechanical condenser microphone with a rigid diaphragm. Background technique [0002] The development trend of electronic products has always been in the direction of thinner and thinner and higher efficiency, and the evolution of microphones is no exception. Microphones are used to receive sound and convert it into electrical signals, and are widely used in daily life, such as being installed in telephones, mobile phones, recording pens, etc. Taking a condenser microphone as an example, the change of the sound will force the corresponding deformation of the membrane structure in the form of sound waves, and the deformation of the membrane structure will cause the capacitance to change. Therefore, the sound can be known by sensing the capacitance change and reading the pressure difference. The change. [0003] Compared with the traditional electret ...

Claims

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Application Information

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IPC IPC(8): H04R19/04
Inventor 方维伦詹竣凯
Owner NATIONAL TSING HUA UNIVERSITY