Glass substrate grinding method and grinding device

A glass substrate and grinding method technology, which is applied in grinding devices, grinding machine tools, grinding machines, etc., can solve the problems of weakened adsorption and broken glass substrates, and achieve the effect of preventing pollution and simplifying the liquid supply system.

Inactive Publication Date: 2011-12-07
ASAHI GLASS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the surface of the sheet is dried, the adsorption of the sheet itself will be weakened, and the glass substrate may be broken during polishing of the glass substrate.

Method used

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  • Glass substrate grinding method and grinding device
  • Glass substrate grinding method and grinding device
  • Glass substrate grinding method and grinding device

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Experimental program
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Embodiment Construction

[0078] Hereinafter, preferred aspects of the polishing method and polishing apparatus of the glass substrate according to the embodiment of the present invention will be described in detail with reference to the drawings.

[0079] figure 1 It is a plan view which shows the whole structure of the polishing apparatus 10 of the glass substrate concerning embodiment. exist figure 1 In, the arrow shows the stage conveyance path of the rectangular-shaped stage 12 which adsorb|sucks and fixes the non-polishing surface of the rectangular-shaped glass substrate G.

[0080] On the stage conveyance path, the liquid spray part 14, the glass substrate fixing part 16, and the polishing part 18 are arrange|positioned in this order from the upstream side of a stage conveyance path toward a downstream side. Moreover, the downstream side of the grinding|polishing part 18 is provided with the glass substrate unloading part and the table cleaning part which are not shown in figure.

[0081] In...

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PUM

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Abstract

PURPOSE: A glass substrate polishing method and a polishing device thereof are provided to prevent the pollution of a rim portion of a non polishing surface due to the polishing solution. CONSTITUTION: A glass substrate(G) polishing method comprises the following steps. The dry preventive solution is sprayed to the table section(12) in which the entire area of a non polishing surface is sucked and fixed from a first nozzle to a table. The buffer solution is sprayed about the table in the section in which the rim portion of the non polishing surface is absorbed from a second nozzle. The entire section of the non polishing surface is absorbed and fixed through the dry preventive solution in the table. The rim part of the non polishing surface is absorbed and fixed through the buffer solution in the table. The polishing liquid is provided to the polishing surface. The polishing surface is polished with a polishing jig.

Description

technical field [0001] The invention relates to a grinding method and a grinding device for a glass substrate. Background technique [0002] Glass substrates for FPDs (Flat Panel Displays) such as liquid crystal displays, for example, use a glass ribbon forming device such as a float furnace to break the glass ribbon formed into a ribbon in a breaking process and process it into a glass with a predetermined rectangular shape and size The substrate is chamfered in the chamfering process to manufacture a glass substrate with a predetermined external dimension. In addition, the glass substrate is transferred to the grinding process through the cleaning process and the inspection process provided in the latter stage of the chamfering process, and the fine unevenness or waviness on the surface is removed by grinding, and the glass substrate that meets the requirements of the FPD glass substrate is manufactured. Flat sheet shape. [0003] In the polishing step, the non-polishing...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/04B24B57/02
CPCB24B7/244B24B41/068
Inventor 小暮祐二石丸直彦城山厚河内辰朗
Owner ASAHI GLASS CO LTD
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