Optical Position Measuring Devices
一种测量设备、光学的技术，应用在采用光学装置、测量装置、采用光学装置传递传感构件等方向，能够解决高制造要求、污染或者空隙、夹杂等问题，达到保证安装公差、低成本、避免信号陡降的效果
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no. 1 example
[0063] According to figure 2 -5 illustrates the first embodiment of the optical position measuring device according to the present invention.
[0064] First resort to figure 2 , 3a And 3b describe the principle scanning light path of this embodiment. figure 2 The radial view of the corresponding optical position measuring device in the yz plane is shown; the (curved) measurement direction is oriented perpendicular to this plane. Figure 3a with 3b Shows the optical position measurement device along figure 2 The tangential cross-sectional views of the section lines AA' and BB' shown in.
[0065] The optical position measurement device shown includes a scanning unit 20 and a measuring tool 10 that can be moved along the bending measurement direction x. In this case, the measuring tool 10 is configured as a radial index arranged on the index piece 11. The index piece 11 is arranged around the rotation axis RA, and a measuring tool 10 and a radial index are arranged around the rota...
no. 2 example
[0101] Image 6 , 7a 7b and 7b schematically show the scanning light path of the second embodiment of the optical position measuring device according to the present invention; here, these drawings correspond to the scanning light path diagram of the first embodiment. Figure 8 A wavefront corrector according to a second embodiment of the optical position measuring device of the present invention is shown in FIG. Only the main differences from the first example discussed in detail will be discussed in depth below.
[0102] Therefore, it is now first stipulated that the triangular prism, which is configured as a beam direction reverser in the first embodiment, can be constructed alternatively. Therefore, in the second embodiment, the beam direction reversers are respectively configured as a combination of spherical mirrors 226.1a, 226.2a and mirrors 226.1, 226.2 arranged at the focal point of the lens. Here, during the radiation process, first the lenses 226.1a, 226.2a are passed i...
no. 3 example
[0108] Picture 9 , 10a The principle configuration of the third embodiment of the optical position measuring device according to the present invention is shown in and 10b. Here, the illustration again corresponds to the scanning light path illustration of the first and second embodiments. Here, these figures again correspond to the scanning light paths of the first and second embodiments. Only the main differences from the previous embodiments are explained below.
[0109] The beam emitted by the light source 321 configured as a laser diode is collimated by the collimating optics 322 and reaches the index plate 311. A measuring tool 310 configured as a radial index is again arranged on the index piece 311. Then, the partial beam deflected to the +1 / -1th diffraction order falls on the first scanning grating 324.1a or 324.2a, that is, the diffractive optical element.
[0110] In this embodiment, the scanning gratings 324.1a, 324.2a combine different optical functions, that is, th...
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