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Cleaning system

A technology of cleaning system and cleaning roller, applied in the field of cleaning system, which can solve the problems of inability to remove foreign matter, poor maintainability, difficulty, etc.

Inactive Publication Date: 2012-02-22
BANDO CHEM IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Foreign matter with an average diameter of 1 μm or less cannot be removed with this type of adhesive roll, and it is difficult to completely remove foreign matter such as dust once attached to the surface (adhesive layer) of the adhesive roll, which is poor in maintainability

Method used

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Examples

Experimental program
Comparison scheme
Effect test

no. 1 specific Embodiment approach

[0167] Such as Figure 12 As shown in (a), the cleaning unit U used in the cleaning system according to the present invention moves the material S to be cleaned relatively while rotating on the surface S1 of the material S to be cleaned while contacting the surface of the cleaning roller 111, and by means of The cleaning roller 111 removes foreign matter such as dust adhering to the surface S1 of the material S to be cleaned by electrostatic force (conductors or dielectrics are not shown).

[0168] The cleaning roller 111 can be charged on the surface by electrostatic force to absorb the charge of foreign matter adhering to the surface S1 of the material S to be cleaned, and use the chargeability of the roller surface (outer peripheral surface) of the cleaning roller 111 to absorb foreign matter. The cleaning roller 111 is rotatably held by an insulating member (not shown), and an electrification control that rotates while contacting the surface (outer peripheral surface) of t...

no. 2 specific Embodiment approach

[0253] Such as Figure 21 As shown in (a), in the cleaning unit U used in the cleaning system, on the surface S1 of the material S to be cleaned, it contacts the surface (peripheral surface) of the cleaning roller 211 and rotates while relatively moving, and by means of the cleaning roller 211 Foreign matter such as dust adhering to the surface S1 of the material S to be cleaned is removed by electrostatic force (conductors or dielectrics are not shown).

[0254] This cleaning roller 211 can peel off the charge for foreign matter attached to the surface S1 of the material S to be cleaned by electrostatic force to remove the charge on the surface by contact with the material S to be cleaned, and is equipped with: a conductive mandrel (mandrel) 211a; a cylindrical inner layer part 211b arranged outside the mandrel 211a; a thin cylindrical outer layer part 211c (for example, a thickness of 30 μm) made of a material with higher resistance than the inner layer part 211b arranged ou...

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PUM

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Abstract

Foreign materials can be continuously attracted by means of a cleaning roller for a relatively long period of time without requiring maintenance. A cleaning roller (11) is brought into contact with the surface (S1) of a material to be cleaned (S), and the foreign materials, such as dusts, which are adhered on the surface (S1) of the material to be cleaned (S) are removed using an electrostatic force. A transfer roller (51) is provided on the cleaning roller (11) surface on the reverse side of the surface having the material to be cleaned (S) thereon, and the foreign materials adhered on the cleaning roller (11) are transferred onto the transfer roller (51). An electrostatic charge control roller (21) which rotates in contact with the outer circumferential surface of the cleaning roller (11) is provided, and the electrostatic charge quantity of an outer layer section (11c) of the cleaning roller (11) can be controlled. As a material for forming the outer layer section of the transfer roller (51), a material which can be charged with electrostatic charges that can attract the foreign materials adhered on the outer circumferential surface of the cleaning roller (11) to the outer circumferential surface by means of an electrostatic force is selected.

Description

technical field [0001] The present invention relates to a cleaning system for removing foreign matter (dust, etc.) adhering to the surface of a material to be cleaned. It is especially suitable for the case where the material to be cleaned is a thin object such as a film, a sheet, or a printed substrate. Background technique [0002] Conventionally, as a cleaning system for removing foreign matter such as dust adhering to the surface of a thin material to be cleaned such as a glass substrate of a flat panel display (FPD) or an adhesive film, it is known to use an adhesive roller to remove the above-mentioned foreign matter by utilizing its adhesive force. Technical solution (for example, refer to Patent Document 1). [0003] Such an adhesive roller cannot remove foreign matter with an average diameter of 1 μm or less, and it is difficult to completely remove foreign matter such as dust once adhering to the surface (adhesive layer) of the adhesive roller, which is poor in ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B6/00
CPCB08B6/00B08B11/04B08B5/02B01D2201/50B08B1/143B08B1/12
Inventor 太田雅史永濑贵行新居俊男松本英树
Owner BANDO CHEM IND LTD
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