The invention provides a process and a device for preparing nano-powder by utilizing ultrasonic static electricity. The process and the device combine the advantages of ultrasonic atomization and static atomization and skillfully overcome the disadvantages of the two. The process mainly comprises the following steps that: raw material is heated to be in a liquid state through a heating furnace, degassed through a degassing device and then conveyed to an atomizer through a pipeline; the raw material in the atomizer is first precharged via a precharging device and then is guided into a nozzle of a piezoelectric-type ultrasonic atomization system through a flow-guiding pipe in order to be atomized; the obtained material is accelerated through a primary acceleration-ring group, enters an inductive charging ring, and is charged and atomized again; the atomized raw material is accelerated through a secondary acceleration-ring group, joined and mixed through a Y-shaped pipe; mixed compounded fog drops are irradiated with an alpha ray source to remove surface charge; the charge-removed fog drops pass through a flow-guiding device (a resistance-wire heating pipe is arranged in the flow-guiding device to perform corresponding thermal decomposition on the fog drops needing thermal decomposition), enter a condenser, are condensed into solid powder; and the solid power leaves the atomizer and then enters a collection device in order to be collected. Therefore, the nano-powder with product stability, high performance, narrow particle distribution, uniform particle distribution, good monodispersity, little agglomeration, high purity and good sphericity can be prepared by utilizing equipment which is simple, low in cost, free from pollution, easy to control and suitable for large-scale continuous industrial production.