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Slit valve for vacuum chamber module

A technology for slit valves and vacuum chambers, which is applied in the direction of lifting valves, valve devices, mechanical equipment, etc., and can solve problems such as maintaining replacement valves and long downtime of modules

Inactive Publication Date: 2012-03-14
PRIMESTAR
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Repairing or replacing conventional slit valves can result in longer module downtime, or greater expense in maintaining an on-hand inventory of replacement valves

Method used

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  • Slit valve for vacuum chamber module
  • Slit valve for vacuum chamber module
  • Slit valve for vacuum chamber module

Examples

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Embodiment Construction

[0022] Reference will now be made in detail to embodiments of the invention, one or more examples of which are illustrated in the accompanying drawings. Each example is provided by way of explanation of the invention, not limitation of the invention. In fact, it will be apparent to those skilled in the art that many modifications and variations can be made in the present invention without departing from the scope or spirit of the invention. For example, features shown or described as part of one embodiment can be used with another embodiment to yield a still further embodiment. Thus, it is intended that the present invention includes such modifications and variations as come within the scope of the appended claims and their equivalents.

[0023] figure 1 One embodiment of a vapor deposition system 10 that may include various embodiments of a slit valve assembly 100 according to aspects of the present invention is shown, particularly as a component of the various types of mod...

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Abstract

The invention relates to a slit valve for a vacuum chamber module. Specifically, a slit valve assembly (100) is configured for attachment to a vacuum chamber module (65) to seal a slot opening (106) in a wall (104) of the module in a closed position and to provide access through the slot opening in an open position. The valve assembly includes a rotatable shaft (108) driven by a rotary actuator (110) between an open rotational position and a closed rotational position. An elongated seal plate (112) seals against the module wall over the slot opening in the closed rotational position of the shaft. At least one arm member (118) connects the seal plate with the shaft. The arm member rotates with the shaft and is pivotally attached to the seal plate. The seal plate is biased to an articulated position relative to the arm member.

Description

technical field [0001] The present invention relates generally to the field of vacuum chamber modules, and more particularly to an improved slit valve for use with such modules. Background technique [0002] The production of thin film photovoltaic (PV) modules (also called "solar panels") typically involves conveying a substrate, such as a glass panel, into and out of a vapor deposition chamber, where a thin film layer of semiconductor material is deposited on the surface of the substrate. The process typically involves transporting substrates through valves into and out of one or more vacuum chamber modules. The valve creates a lock through which the substrate is conveyed, and generally defines a notch slightly larger than the cross-section of the substrate in the open position of the valve. Therefore, this valve is commonly referred to in the art as a "slit valve". [0003] Conventional slit valves are typically self-contained units that include a housing that mounts to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K1/18F16K1/46F16K1/32H01L31/18
CPCH01L21/67126F16K51/02F16K1/2007F16K1/24
Inventor R·W·布莱克
Owner PRIMESTAR
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