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Light source device

A light source device and technology of light source, which are applied in projection devices, lighting devices, photolithography process exposure devices, etc., can solve the problem of inability to emit high-brightness light, and achieve the effect of improving utilization efficiency and high brightness

Inactive Publication Date: 2012-03-21
USHIO DENKI KK
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] However, it has been found that when the emitted light emitted from a plurality of LED light sources having different peak wavelengths is combined by a beam splitter, only the optical system of the above-mentioned structure is used to form a plurality of LED light sources and a beam splitter. It is only configured in a way, and cannot emit sufficient high-brightness light

Method used

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Embodiment Construction

[0071] Hereinafter, embodiments of the present invention will be described in detail.

[0072] figure 1 It is an explanatory diagram showing a schematic structure of an example of the optical system of the light source device of the present invention.

[0073] This optical system is to synthesize the respective radiations with mutually different peak wavelengths λ 1 [nm], λ 2 [nm] and λ 3 [nm](λ 1 >λ 2 >λ 3 ) optical system for emitting light from the first LED light source, the second LED light source, and the third LED light source of the three LED light sources.

[0074]In this optical system, the (circular) plate-shaped first beamsplitter 51 and the (circular) plate-shaped second beamsplitter 56 are displaced from one side to the other in the plane direction, and one side of the first beamsplitter 51 51A and the other surface 56B of the second dichroic mirror 56 are disposed opposite to each other, and the first LED element 10 constituting the first LED light sourc...

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Abstract

The invention provides a light source device. In a structure where emission lights of multiple LED light sources are synthesized and emitted, lights with multiple peak wavelengths and continuous wide wavelength range can be emitted so as to realize high brightness. The light source device synthesizes and emits emission lights of more than three LED light sources with different peak wavelengths. The light source device comprises a first spectroscope for synthesizing emission lights that are emitted from a first LED light source and a second LED light source; and a second spectroscope for synthesizing synthesis lights generated by the first spectroscope and emission lights emitted from a third LED light source. The synthesis lights generated by the first spectroscope are reflected by the second spectroscope, and the emission lights emitted from the third LED light source are transmitted, thereby obtaining synthesis lights.

Description

technical field [0001] The present invention relates to a light source device used, for example, as a light source for exposure during exposure processing in manufacturing processes of semiconductors, liquid crystal substrates, color filters, etc., or as a light source of a projector device. Background technique [0002] For example, as an exposure light source used in the exposure process in the manufacturing process of semiconductors, liquid crystal substrates, color filters, etc., there are known Figure 4 The LED light emitting unit 80 formed by arranging a plurality of LED elements in the ultraviolet wavelength region in a planar manner condenses the radiated light emitted from the LED light emitting unit 80 through an appropriate condensing optical system. And emit to the light source device of the structure of exposure surface S (for example, refer patent document 1). exist Figure 4 Among them, symbol 81 is an elliptical reflector, 82 is a spherical lens, 83 is a con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03B21/20G03F7/20G02B27/10F21V9/40
CPCG03F7/2004G03F7/70008G03F7/70233G03F7/70391G03F9/7065
Inventor 松岛竹夫芜木清幸
Owner USHIO DENKI KK
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