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Vacuum transmission processing equipment and method

A technology of vacuum transmission and process equipment, applied in the direction of final product manufacturing, sustainable manufacturing/processing, electrical components, etc., can solve problems such as low production efficiency

Active Publication Date: 2012-03-21
KINGSTONE SEMICONDUCTOR LIMITED COMPANY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to overcome the defect of low production efficiency of the vacuum process method in the prior art, and provide a vacuum transmission process equipment with high production efficiency and a corresponding vacuum transmission process method

Method used

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  • Vacuum transmission processing equipment and method
  • Vacuum transmission processing equipment and method
  • Vacuum transmission processing equipment and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] Such as figure 1 As shown, the vacuum transmission process equipment of this embodiment first includes a vacuum process chamber 1, and a processing device 2 is arranged in the vacuum process chamber 1, and the processing device 2 uses a processing medium 3 to process the workpiece. The processing device 2 is relatively Preferably, the workpiece is processed in a non-contact manner, such as processing the workpiece with an ion beam or plasma. At this time, the processing medium 3 is correspondingly an ion beam or plasma. In addition, the processing device 2 can also be used for heat treatment or annealing of the workpiece. processing equipment, etc.

[0061] The vacuum transfer processing equipment also includes at least two inlet and outlet chambers, such as figure 1 The inlet and outlet chambers 4a and 4b in the inlet and outlet chambers, some of the inlet and outlet chambers are connected to one side of the vacuum process chamber 1, while the rest of the inlet and ou...

Embodiment 2

[0080] Such as figure 2 As shown, the difference between the vacuum transmission process equipment in this embodiment and the equipment in Embodiment 1 is only that: in Embodiment 2, the transport platform corresponding to the inlet and outlet cavity located on one side of the vacuum process chamber 1 It is the same as the two-by-two moving plane of the transport platform corresponding to the inlet and outlet cavity located on the other side of the vacuum process chamber 1, for example, in figure 2Among them, the moving planes of the transfer platform 5a and the transfer platform 5b are the same; and the vacuum transfer process method in this embodiment is exactly the same as that in Embodiment 1. Thanks to the above design, for each pair of transmission platforms with the same moving plane, since the workpieces are processed in the same plane, it is possible to completely eliminate the differences in processing strength and processing uniformity between each pair of transmi...

Embodiment 3

[0082] Such as image 3 As shown, the difference between the vacuum transmission process equipment in this embodiment and the vacuum transmission process equipment in Embodiment 1 is only that: in Embodiment 3, each inlet and outlet chamber includes a first chamber and a first chamber. Two chambers, the first chamber of some of the inlet and outlet chambers is connected to one side of the vacuum process chamber, the second chamber is connected to the other side of the vacuum process chamber, and the first chambers of the other inlet and outlet chambers are connected On the other side of the vacuum process chamber, the second chamber communicates with one side of the vacuum process chamber, for example image 3 The inlet and outlet chamber 4a is composed of a first chamber 4aa and a second chamber 4ab, while the inlet and outlet chamber 4b is composed of a first chamber 4ba and a second chamber 4bb.

[0083] The number of first chambers disposed on both sides of the vacuum pro...

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Abstract

The invention discloses vacuum transmission processing equipment. The vacuum transmission processing equipment comprises at least two piece inlet and outlet cavities, at least two transmission platforms corresponding to each piece inlet and outlet cavity one by one, at least one first mechanical arm and at least one second mechanical arm, wherein a processing medium can pass through each transmission platform but cannot pass through a workpiece; and each transmission platform is used for continuously moving from the piece inlet and outlet cavities to a vacuum processing cavity, finishing semi-machining of the workpiece by using the processing medium in turn, and then moving from the vacuum processing cavity to the piece inlet and outlet cavities and finishing complete machining of the workpiece by using the processing medium. The invention also discloses the other three types of vacuum transmission processing equipment and the other four vacuum transmission processing methods. By the equipment and the method, continuous machining of the workpiece can be realized and extremely high production efficiency can be achieved.

Description

technical field [0001] The invention relates to vacuum process technology, in particular to a vacuum transmission process equipment and a corresponding vacuum transmission process method. Background technique [0002] New energy is one of the five most decisive technological fields in the world's economic development in the 21st century, and solar energy is a clean, efficient and inexhaustible new energy. In the new century, governments of all countries regard the utilization of solar energy resources as an important content of the national sustainable development strategy. Photovoltaic power generation has many advantages such as safety, reliability, no noise, no pollution, less constraints, low failure rate, and easy maintenance. In recent years, with the rapid development of the international photovoltaic power generation industry, the supply of solar wafers exceeds the demand, so improving the photoelectric conversion efficiency of solar wafers and the production capacit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 钱锋
Owner KINGSTONE SEMICONDUCTOR LIMITED COMPANY
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