Apparatus and system for cleaning substrate
A substrate and cleaning technology, applied in the direction of cleaning methods and appliances, chemical instruments and methods, electrical components, etc., can solve problems such as difficulties
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[0016] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some or all of these specific details. In other instances, well known process operations have not been described in detail in order not to unnecessarily obscure the present invention.
[0017] Substrates referred to herein mean, but are not limited to, semiconductor wafers, hard drive disks, optical disks, glass substrates, flat panel display surfaces, and liquid crystal display surfaces, etc., which may be contaminated during manufacturing or processing operations. Depending on the actual substrate, surfaces can be contaminated in different ways, and acceptable levels of contamination are defined in the particular industry in which the substrate is processed. For ease of discussion, substrate contamination is described here...
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