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An active vibration isolation and damping system

A damping system, active technology, used in control/regulation systems, mechanical oscillation control, non-electric variable control, etc., can solve problems such as not providing solutions

Active Publication Date: 2012-05-16
MECAL INTPROP & STANDARDS BV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

While this sensor can be applied to active vibration systems, it does not provide a relatively simple solution

Method used

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  • An active vibration isolation and damping system
  • An active vibration isolation and damping system
  • An active vibration isolation and damping system

Examples

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Embodiment Construction

[0026] figure 1is a schematic diagram of an active vibration isolation and damping system according to the prior art. The system comprises a payload to be isolated or damped (2), a bearing body (3, 3') supporting the payload, at least one vibration sensor (4 or 4') for detecting vibrations of the payload, at least one An actuator (5 or 5') for moving the payload, and a controller (6 or 6') for providing a signal to the actuator; where the signal represents ) vibration. The vibration sensor (4') can be arranged or fixed on the payload (2), or the sensor (4) can be arranged or fixed on the bearing body (3) for measuring the relative displacement. The payload may be supported by conventional suspension means (7) such as mechanical springs or elastomers. The bearing body can be any supporting structure for the payload, including racks, floors, walls or ceilings. The actuator is arranged or fixed on the bearing body. The actuator may be, for example, a piezoceramic type piezo...

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PUM

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Abstract

An active vibration isolation and damping system (11) comprises a payload (12) that has to be isolated or damped, a vibration sensor (14) for detecting a vibration of the payload, an actuator (15) for moving the payload relative to a bearing body (13) supporting the payload, and a controller (16) for providing the actuator with a signal that is representative for the vibration. The system provides a solution for the tilting problem by applying a vibration sensor that has a low stiffness connection to the payload (12) for rotation along an axis (17) perpendicular to the gravitational force (18), and a high stiffness connection to the payload (12) for the vibration detectable with the vibration sensor.

Description

technical field [0001] The present invention relates to an active vibration isolation and damping system comprising a payload to be isolated or damped, a vibration sensor for detecting vibrations of the payload, a An actuator for moving the payload by the bearing body, and a controller for providing the actuator with a signal indicative of the vibration. Background technique [0002] Floor vibrations and other mechanical disturbances are increasingly becoming limiting factors for applications that require the environment to be free from disturbing vibrations. Space equipment developed on Earth requires a test environment similar to that of working in space. The expected further reductions in size for semiconductor products such as processors and memories require that the lithographic equipment used to manufacture these products have better stability than currently used lithographic equipment. In addition, vibrations prevent further improvements in the resolution of electro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F15/02G05D19/02
CPCG05D19/02F16F15/02
Inventor N·里恩维尔德T·科内尼斯·范登杜尔
Owner MECAL INTPROP & STANDARDS BV