Vaccum evaporator and vaccum evaporating method using the same
A vacuum deposition and deposition source technology, applied in vacuum evaporation plating, ion implantation plating, coating, etc., can solve the problems of disconnection, battery volume usage rate drop, deterioration, etc.
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[0030] The present invention will be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. The drawings and descriptions are to be regarded as illustrative in nature and not restrictive. Throughout the specification, the same reference numerals denote the same elements.
[0031] For example, in the vacuum deposition apparatus and the vacuum deposition method using the vacuum deposition apparatus according to an exemplary embodiment of the present invention, lithium is deposited on the active substrate formed on the positive electrode and the negative electrode forming the electrode assembly of the lithium ion battery. Substance coated parts. In this case, in an exemplary embodiment, lithium is not deposited to t...
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