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Device and method for processing substrate, and method for producing a processed substrate

A processing device and processing method technology, applied in the direction of manufacturing tools, explosion generating devices, metal processing equipment, etc., can solve problems such as bright spots or black spots display defects, and achieve the effect of smooth and simple structure on the surface of the substrate

Inactive Publication Date: 2012-05-23
SHARP KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] If a glass substrate with a defect is used to make a flat panel display, display defects such as bright spots or black spots will be generated near the defect

Method used

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  • Device and method for processing substrate, and method for producing a processed substrate
  • Device and method for processing substrate, and method for producing a processed substrate
  • Device and method for processing substrate, and method for producing a processed substrate

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Embodiment approach 1

[0051] The first embodiment of the present invention will be described below. In addition, the present invention is not limited thereto, and as long as there is no particularly restrictive description of the dimensions, materials, shapes, and relative arrangements of the components described in the present embodiment, the scope of the present invention is not limited thereto. The meaning is just an example. In addition, in this specification, "A-B" showing a range means "more than A and less than B."

[0052] In this embodiment, among the substrate processing apparatus and processing method, a glass substrate defect correction apparatus and defect correction method will be described as examples. However, the present invention is not limited to these, and is applicable to general substrate (material) processing devices and processing methods.

[0053] Here, the substrate (material) to be processed is not particularly limited as long as it is a brittle material, and examples t...

Embodiment approach 2

[0108] A second embodiment of the present invention will be described below. In addition, for convenience of description, members having the same functions as those in the drawings described in Embodiment 1 are denoted by the same reference numerals and their descriptions are omitted.

[0109] The defect correction method of this embodiment is a defect correction method for a glass substrate constituting a display panel, and the defect to be corrected is a protrusion as a surface defect formed on the glass substrate. As described in Embodiment 1, some of these protrusions are formed due to the presence of internal defects, but some are formed regardless of internal defects.

[0110] In addition, the defect correction method of the present embodiment is applicable to glass substrates constituting various display panels such as liquid crystal display panels and plasma display panels (PDP), as in the case of the first embodiment.

[0111] Furthermore, the defect correction metho...

Embodiment approach 3

[0120] A third embodiment of the present invention will be described below. In addition, for convenience of description, members having the same functions as those in the drawings described in Embodiment 1 are denoted by the same reference numerals and their descriptions are omitted.

[0121] The defect correction method of this embodiment is a defect correction method for a glass substrate constituting a display panel, and the defect to be corrected is a flaw formed on the glass substrate as a surface defect.

[0122] In addition, the defect correction method of the present embodiment is applicable to glass substrates constituting various display panels such as liquid crystal display panels and plasma display panels (PDP), as in the case of the first embodiment.

[0123] Furthermore, the defect correction method of the present embodiment can be implemented at various stages in the manufacture of the glass substrate and the display panel, as in the case of the first embodiment...

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Abstract

Disclosed are a device for processing a substrate and a method for processing a substrate employing said processing device, which are simple and make it possible to provide a processed substrate which has a smooth surface. Also provided is a method for producing a processed substrate employing said processing method. A device (10) for processing a substrate (1) has disposed thereon a member (12) for spraying abrasive grains (12a) in such a way that the angle of spraying of the abrasive grains (12a) with respect to the surface of the substrate (1) which is being processed is an angle employed in brittleness processing, and a spray direction changing member (18) for changing the angle of entry of the abrasive grains (12a) onto the processing surface of the substrate (1) from an angle employed in brittleness processing to an angle employed in ductility processing is disposed between the spraying member (12) and the processing surface of the substrate (1) in the direction of spraying of the abrasive grains (12a). The spray direction changing member (18) is moveable.

Description

technical field [0001] The present invention relates to a processing device for a substrate, a processing method for a substrate, and a manufacturing method for processing a substrate. More specifically, it relates to a substrate processing device that can smooth (mirror surface) a processed substrate surface, a substrate processing method using the processing device, and manufacture of a processed substrate using the processing method. method. Background technique [0002] Conventionally, recesses are formed on the surface of the substrate for the purpose of correcting defects of the substrate, etc., and therefore, processing of the substrate, such as shot blasting, is generally performed. [0003] For example, regarding glass substrates, one of the requirements for glass substrates accompanying the increase in the size of displays in recent years is the reduction of defects in glass substrates. Here, the defect of a glass substrate means internal defect, such as an inter...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24C1/04B24C5/02B24C5/04
CPCB24C1/04B24C3/04B24C3/02
Inventor 吉泽武德水上惠文
Owner SHARP KK